Optics and Precision Engineering, Volume. 18, Issue 11, 2454(2010)
Fabrication of single-crystal silicon vibrating ring gyroscope
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ZHANG Ming, CHEN De-yong, WANG Jun-bo. Fabrication of single-crystal silicon vibrating ring gyroscope[J]. Optics and Precision Engineering, 2010, 18(11): 2454
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Received: Mar. 10, 2010
Accepted: --
Published Online: Dec. 13, 2010
The Author Email: ZHANG Ming (zhangming05@mails.gucas.ac.cn)
CSTR:32186.14.
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