Fig. 1. Diagram of high-precision laser tracking system based on two-dimensional galvanometers and PSD

Fig. 2. Geometrical optics model of high-precision laser tracking system based on two-dimensional galvanometers and PSD

Fig. 3. Scanning pattern of two-dimensional galvanometer

Fig. 4. Point position accuracy when b=100 m. (a) δx; (b) δy; (c) δxy

Fig. 5. Error analysis when φ1=-8°, φ2=-5°, dt=0.05 m, b=100 m, and δφ1=δφ2=1.5 μrad. (a) Error ellipsoid; (b) relative position error of tracking system

Fig. 6. Position error analysis. (a) Error ellipsoids; (b) relative position error caused by distance meter as a function of distance at different rotation angles