Research Progresses of MEMS Fabry-Perot Filtering Chips and Their Applications for Spectral Detection

Kui Zhou; Zheng Shan; Qian Zhang; Xiejun Wang; Jian Zhou; Chenwei Deng; Yiting Yu

doi:10.3788/AOS202242.0800001

Acta Optica Sinica, Volume. 42, Issue 8, 0800001(2022)

Research Progresses of MEMS Fabry-Perot Filtering Chips and Their Applications for Spectral Detection

Kui Zhou^1,2, Zheng Shan^1,2, Qian Zhang^1,2, Xiejun Wang^1,2, Jian Zhou³, Chenwei Deng⁴, and Yiting Yu^1,2、*

¹Ningbo Institute, Research & Development Institute in Shenzhen, School of Mechanical and Engineering, Northwestern Polytechnical University, Xi′an, Shaanxi 710072, China;

²Key Laboratory of Micro/Nano Systems for Aerospace (Ministry of Education), Key Laboratory of Micro and Nano Electro-Mechanical Systems of Shaanxi Province, Northwestern Polytechnical University, Xi′an, Shaanxi 710072, China

³Xian Modern Control Technology Research Institute, Xi′an, Shaanxi 710065, China

⁴School of Information and Electronics, Beijing Institute of Technology, Beijing 100081, China

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Kui Zhou, Zheng Shan, Qian Zhang, Xiejun Wang, Jian Zhou, Chenwei Deng, Yiting Yu. Research Progresses of MEMS Fabry-Perot Filtering Chips and Their Applications for Spectral Detection[J]. Acta Optica Sinica, 2022, 42(8): 0800001

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Paper Information

Category: Reviews

Received: Aug. 3, 2021

Accepted: Oct. 27, 2021

Published Online: Mar. 30, 2022

The Author Email: Yu Yiting (yyt@nwpu.edu.cn)

DOI:10.3788/AOS202242.0800001

Topics

laser devices and laser physics

Lasers and Laser Optics

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laser manufacturing

Instrumentation, Measurement and Metrology