Fig. 1. Infrared transmittance spectra of DLC film samples prepared under different conditions

Fig. 2. XPS surveys of DLC films prepared under different conditions

Fig. 3. Oxygen contents in DLC films

Fig. 4. Deconvoluted C1s spectra of DLC films and their fitting. (a) P-DLC film prepared in base vacuum; (b) O-DLC film prepared in oxygen atmosphere of 2 Pa

Fig. 5. Contents of sp2 bond and sp3 bond in DLC films

Fig. 6. Configuration transforms between the atomic bonds in O-DLC film. (a) Transformation from sp2 to sp3; (b) transformation from sp3 to sp2

Fig. 7. XRD patterns of DLC films