Chinese Optics Letters, Volume. 22, Issue 11, 112201(2024)
Fabrication-constrained inverse design and demonstration of high-performance grating couplers
Figures & Tables(9)
Fig. 1. Schematic diagram of optimized GC. TOX, top oxide; BOX, bottom oxide.
Fig. 2. The simulated CE as a function of (a) etch depth; (b) TOX thickness.
Fig. 3. Simulated transmission spectra of UGC and optimized GCs with various fabrication constraints.
Fig. 5. (a) Top view and (b) partial enlarged drawing of an SEM micrograph of an optimized GC fabricated by EBL.
Fig. 6. 3D morphologies and etch depths at the (a), (c) widest and (b), (d) narrowest grooves of the EBL-fabricated GC.
Fig. 7. Simulation and experimental transmission spectra of optimized GCs with various MFSs.
Fig. 8. Measured transmission spectra of optimized GCs with (a) 60, (b) 100, (c) 130, (d) 160 nm MFSs at various groove width variables.
Table 1. Summary of the Simulated (Sim) and Experimental (Exp) CEs for Different GCs Reported in the Literatures
View tableView in ArticleTable 1. Summary of the Simulated (Sim) and Experimental (Exp) CEs for Different GCs Reported in the Literatures
Ref. SOI (nm) Structure Band MFS (nm) Sim CE (dB) Exp CE (dB) Process [ 10 ]220 Multilayer etching C 200 −2.4 −4.2 248 nm DUV [ 13 ]220 BBGC C 74 −2.2 −4.1 EBL [ 14 ]220 BBGC C 57 −1.78 −3.69 EBL [ 20 ]220 Apodization C 30 −2.15 — — [ 11 ]220 Apodization C 100 −1.9 — — [ 23 ]220 Apodization C 180 −2.6 −3.1 248 nm DUV [ 12 ]220 Apodization C 60 −1.6 — — [ 25 ]220 Apodization C 100 −1.94 — — [ 29 ]220 Apodization C 50 −2.13 — — This work 220 Improved apodization C 60 −1.55 −2.70 EBL 100 −1.63 −2.89 130 −1.69 −2.83 160 −2.02 −3.31 180 −2.29 −3.72 180 −2.29 −2.77 248 nm DUV
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Xin Jin, Jinbin Xu, Yaqian Li, Cuiwei Xue, Rujun Liao, Liucheng Fu, Min Liu, Yunliang Shen, Xueling Quan, Xiulan Cheng, "Fabrication-constrained inverse design and demonstration of high-performance grating couplers," Chin. Opt. Lett. 22, 112201 (2024)
Paper Information
Category: Optical Design and Fabrication
Received: Apr. 23, 2024
Accepted: May. 31, 2024
Posted: Jun. 3, 2024
Published Online: Nov. 26, 2024
The Author Email: Xiulan Cheng (xlcheng@sjtu.edu.cn)
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