Chinese Journal of Lasers, Volume. 36, Issue 8, 2171(2009)

Methods for Decreasing Optical Parameters Reverse Determination Uncertainty of Thin Films Caused by Spectral Measurement Errors

Wu Suyong*, Long Xingwu, Huang Yun, and Yang Kaiyong
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    CLP Journals

    [1] Wu Suyong, Long Xingwu, Yang Kaiyong. Technique to Minimize the Characterization Deviations of Optical Parameters of Thin Films Caused by Ellipsometric Measurement Systematic Errors[J]. Acta Optica Sinica, 2012, 32(6): 631001

    [2] Wu Suyong, Long Xingwu, Yang Kaiyong, Huang Yun. Performance Analysis of Local Optimization Algorithm in Reverse Engineering of Multilayer Optical Coatings[J]. Acta Optica Sinica, 2011, 31(6): 631001

    [3] Jian Yudong, Tang Jianxun, Wu Suyong, Tan Zhongqi. Model for Rapid Reverse Determination of the Refractive Index Bulk Inhomogeneity of Thin Films at Oblique Incidence[J]. Acta Optica Sinica, 2016, 36(1): 131001

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    Wu Suyong, Long Xingwu, Huang Yun, Yang Kaiyong. Methods for Decreasing Optical Parameters Reverse Determination Uncertainty of Thin Films Caused by Spectral Measurement Errors[J]. Chinese Journal of Lasers, 2009, 36(8): 2171

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    Paper Information

    Category: materials and thin films

    Received: Dec. 12, 2008

    Accepted: --

    Published Online: Aug. 13, 2009

    The Author Email: Wu Suyong (吴素勇|sywu2001@163.com)

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