[1] [1] WENDIN G.Quantum information processing with superconducting circuits:a review ［J］.Reports on Progress in Physics,2017,80:106001.

[2] [2] GU X,KOCKUM A F,MIRANOWICZ A,et al.Microwave photonics with superconducting quantum circuits ［J］.Physics Reports,2017,718:1 102.

[3] [3] YAMAMOTO T,PASHKIN Y A,ASTAFIEV O,et al.Demonstration of conditional gate operation using superconducting charge qubits ［J］. Nature,2003,425(6961):941 944.

[4] [4] LIU Y X,WEI L F,TSAI J S,et al.Controllable coupling between flux qubits［J］.Physical Review Letters,2006,96(6):067003.

[5] [5] PAIK H,MEZZACAPO A,SANDBERG M,et al. Experimental demonstration of a resonator induced phase gate in a multi qubit circuit QED system［J］.Physical Review Letters,2016,117(25):250502.

[6] [6] FEDOROV A,STEFFEN L,BAUR M,et al.Implementation of a Toffoli gate with superconducting circuits ［J］.Nature,2012,481(7380):170 172.

[7] [7] BLAIS A,GAMBETTAL J,WALLRAFF A,et al.Quantum information processing with circuit quantum electrodynamics［J］.Physical Review B,2007,75(3):032329.

[8] [8] BLAIS A, HUANG R S,WALLRAFF A,et al.Cavity quantum electrodynamics for superconducting electrical circuits:An architecture for quantum computation［J］.Physical Review A, 2004, 69(6):666 670.

[9] [9] GUO Y Q,JIANG N Q.Controllably coupling superconducting charge and flux qubits by using nanomechanical resonator ［J］.Chain Physics Letter,2017,34:050302.

[10] [10] CHU Y,KHAREL P,RENNINGER W H,et al.Quantum acoustics with superconducting qubits［J］.Science,2017,358:199 202.

[11] [11] O’CONNELL A D,HOFHEINZ M,ANSMANN M,et al.Quantum ground state and single phonon control of a mechanical resonator［J］.Nature,2010,464(7289):697.

[12] [12] SANTOS J T,LI J,ILVES J,et al.Optomechanical measurement of a millimeter sized mechanical oscillator approaching the quantum ground state［J］.New Journal of Physics, 2017,19:103014

[13] [13] WOOLLEY M J,EMZIR M F,MILBURN G J,et al.Quartz superconductor quantum electromechanical system ［J］. Physical Review B,2016,93(22):224518.

[14] [14] CLELAND A N,GELLER M R.Superconducting qubit storage and entanglement with nanomechanical resonators［J］.Physical Review Letters,2004,93(7):070501.

[15] [15] GELLER M R,CLELAND A N.Superconducting qubits coupled to nanoelectromechanical resonators: An architecture for solid state quantum information processing ［J］.Physical Review A, 2005, 71:032311.

[16] [16] KUANGWOO N,YUNKWON P,BYEOUNGJU H,et al. Piezoelectric properties of aluminum nitride for thin film bulk acoustic wave resonator ［J］.Journal of the Korean Physical Society,2005,47(92):S309 S312.

[17] [17] KOCH J,YU T M,GAMBETTA J,et al.Charge insensitive qubit design derived from the cooper pair box ［J］.Physics,2007,76(4):538 538.

[18] [18] SCHUNCH N,SIEWERT J. Natural two qubit gate for quantum computation using the XY interaction ［J］.Physical Review B,2003,67:032301.

[19] [19] IMAMOGLU A,AWSCHALOM D D,BURKARD G,et al. Quantum information processing using quantum dot spins and cavity QED［J］. Physical Review Letters,1999,83(20):4202 4207.

[20] [20] LIU Y X,WEI L F,NORI F.Measuring the quality factor of a microwave cavity using superconducting qubit devices ［J］.Physical Review B,2005,72:033818.

[22] [22] LI J,SANTOS J T,SILLANPM A. High precision displacement sensing of monolithic piezoelectric disk resonators using a single electron transistor ［J］.Journal of Low Temperature Physics,2018,191(5/6):1 14.

[23] [23] YAN F,KRANTZ P,SUNG Y,et al.Tunable coupling scheme for implementing high fidelity two qubit gates ［J］. Phys Rev Appl,2018,10:054062.

[24] [24] LECOCQ F, SIMMONDS R W, AUMENTADO J, et al. Resolving the vacuum fluctuations of an optomechanical system using an artificial atom ［J］. Nature Physics,2015,11(8):635 639.

[25] [25] GUSTAFSSON M V,AREF T,KOCKUM A F,et al. Propagating phonons coupled to an artificial atom ［J］.Science,2014,346(6206):207.

[26] [26] PIRKKALAINEN J M,CHO S U,LI J,et al. Hybrid circuit cavity quantum electrodynamics with a micromechanical resonator ［J］. Nature,2013,494:211.