Journal of Applied Optics, Volume. 44, Issue 5, 992(2023)

Design of dispersive objective of chromatic confocal for scratch detection

Jin ZHANG1, Yang XIANG1、*, Lei HUANG2, and Yanhong DOU2
Author Affiliations
  • 1School of Electro-optical Engineering, Changchun University of Science and Technology, Changchun 130022, China
  • 2Jilin Key Laboratory of Measuring Instrument and Technology, Jilin Institute of Metrology, Changchun 130103, China
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    References(15)

    [1] CHI Xinyan, YANG Lu, HUANG Lei. Development of measuring device for white light confocal locomotive wheelset[J]. Measurement Technique, 551, 27-31(2020).

    [2] RUPRECHT A K, PRUSS C, TIZIANI H J et al. Confocal micro-optical distance sensor: principle and design[J]. Optical Measurement Systems for Industrial Inspection IV, 5856, 128-135(2005).

    [3] SHAFIR E, BERKOVIC G. Expanding the realm of fiber optic confocal sensing for probing position, displacement, and velocity[J]. Applied Optics, 45, 7772-7777.(2006).

    [4] LIU Qian, YANG Weichuan, YUAN Daocheng et al. Design of linear dispersive objective for chromatic confocal microscope[J]. Optics and Precision Engineering, 21, 2473-2479(2013).

    [5] WU Pengyue, YUAN Daocheng. Research of design of lenses used for chromatic confocal displacement sensor[J]. Tool Engineering, 46, 81-83(2012).

    [6] TIAN Yu, LIU Bin. Design of dispersion lens for chromatic confocal displacement sensor[J]. Optical Technique, 44, 381-384(2018).

    [7] WANG Jikai, XIANG Yang, WANG Peifang. Study on diffraction efficiency of infrared double-layer diffractive optical element[J]. Journal of Changchun University of Science and Technology(Natural Science Edition), 39, 25-29(2016).

    [8] LUO Gangyin, WANG Bidou, MIAO Peng et al. Optical design of near infrared fluorescence confocal laser scanning system[J]. Journal of Applied Optics, 36, 29-34(2015).

    [9] LIANG Qing, XUE Dan, WU Xingyu. Lens design for chromatic confocal displacement sensor[J]. Optical Technique, 45, 653-659(2019).

    [10] LIU Qian, YANG Weichuan, YUAN Daocheng et al. Optimization and selection of materials for dispersive objective of chromatic confocal microscope[J]. Opto-Electronic Engineering, 39, 111-117(2012).

    [11] YAN Kai. Research of thickness detection system based on spectral confocal[D](2018).

    [12] NOVAK J, MIKS A. Hyperchromats with linear dependence of longitudinal chromatic aberration on wavelength[J]. Optik - International Journal for Light and Electron Optics, 116, 165-168.(2005).

    [13] ZHANG Z L, LU R S. Initial structure of dispersion objective for chromatic confocal sensor based on doublet lens[J]. Optics and Lasers in Engineering, 139, 160424(2021).

    [14] YU Xiaohui, GAO Zhishan, YUAN Qun. Design of board spectrum and long work distance microscope objective for weak fluorescence signal detection[J]. Optics and Precision Engineering, 26, 1588-1595(2018).

    [15] LIU Yuqin, ZHANG Mengwei. Tolerance analysis of switch-in-group zoom optical system[J]. Optical Instruments, 35, 42-45(2013).

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    Jin ZHANG, Yang XIANG, Lei HUANG, Yanhong DOU. Design of dispersive objective of chromatic confocal for scratch detection[J]. Journal of Applied Optics, 2023, 44(5): 992

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    Paper Information

    Category: Research Articles

    Received: Nov. 15, 2022

    Accepted: --

    Published Online: Mar. 12, 2024

    The Author Email: Yang XIANG (向阳)

    DOI:10.5768/JAO202344.0501007

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