Useful way to compensate for intrinsic birefringence caused by calcium fluoride in optical lithography systems

Zelong Zhou; Hongbo Shang; Yongxin Sui; Huaijiang Yang

doi:10.3788/COL201816.032201

Chinese Optics Letters, Volume. 16, Issue 3, 032201(2018)

Useful way to compensate for intrinsic birefringence caused by calcium fluoride in optical lithography systems

Zelong Zhou^1,2、*, Hongbo Shang¹, Yongxin Sui¹, and Huaijiang Yang¹

¹Engineering Researcher Center of Extreme Precision Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China

²University of Chinese Academy of Sciences, Beijing 100049, China

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Zelong Zhou, Hongbo Shang, Yongxin Sui, Huaijiang Yang, "Useful way to compensate for intrinsic birefringence caused by calcium fluoride in optical lithography systems," Chin. Opt. Lett. 16, 032201 (2018)

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Paper Information

Category: Optical Design and Fabrication

Received: Oct. 11, 2017

Accepted: Jan. 4, 2018

Published Online: Jul. 13, 2018

The Author Email: Zelong Zhou (zhouxmq@163.com)

DOI:10.3788/COL201816.032201

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