Fig. 1. Diagram of vector light field focusing

Fig. 2. Flow chart of vector G-S algorithm

Fig. 3. Comparison of results obtained by vector G-S algorithm and scalar G-S algorithm. (a)-(h) After 10 iterations; (i)-(l) after 100 iterations

Fig. 4. Uniformity of multifocal array as a function of number of iterations

Fig. 5. Schematic of femtosecond laser fabrication system based on spatial light modulator

Fig. 6. Relationship of line width with laser power and scanning speed. (a) Line widths under different laser powers when scanning speed is 2 mm·s^-1; (b) line widths under different scanning speeds when laser power is 0.5 mW; line width as functions of (c) laser power or (d) scanning speed

Fig. 7. Experiment of parallel laser fabrication under different multifocal arrays

Fig. 8. Parallel laser fabrication experiment under multifocal array with arbitrary arrangement structure

Fig. 9. Experiment of “T”-pattern dynamic parallel laser fabrication. Phase pattern at (a) position 1 and (b) position 2; (c) simulated plot after all focal spots superimposed; (d) micrograph