Acta Optica Sinica, Volume. 40, Issue 10, 1014004(2020)

Dynamic Laser Parallel Fabrication Based on Multifocal Array

Zhiyong Shi1, Liqiang Zhou1, Lichun Zhang1, Zhigang Li1, Qiang Shi1,2, and Linwei Zhu1、*
Author Affiliations
  • 1School of Physics and Optoelectronics Engineering, Ludong University, Yantai, Shandong 264025, China
  • 2Beijing Magie Nano-Technology Co. Ltd., Beijing 102208, China
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    To improve the uniformity and controllability of the multifocal array in laser parallel fabrication, a vector iterative optimization phase algorithm is proposed based on the property of the vector Fourier transform in an objective focusing system. Based on this iterative algorithm, a multifocal array with high uniformity can be produced and the position of each focal spot can be precisely controlled. The numerical simulation and experimental results show that the optimized phase can be utilized to generate a multifocal array with high uniformity. Furthermore, applying the homemade femtosecond laser fabrication system based on a spatial light modulator and taking gold films as the sample, we confirm the validity of laser parallel fabrication. The experimental results demonstrate that using the proposed algorithm, one can achieve the laser parallel fabrication based on multifocal array with an arbitrary arrangement structure. In addition, the dynamic scanning laser fabrication can also be realized by dynamically loading phase patterns.

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    Zhiyong Shi, Liqiang Zhou, Lichun Zhang, Zhigang Li, Qiang Shi, Linwei Zhu. Dynamic Laser Parallel Fabrication Based on Multifocal Array[J]. Acta Optica Sinica, 2020, 40(10): 1014004

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    Paper Information

    Category: Lasers and Laser Optics

    Received: Dec. 19, 2019

    Accepted: Feb. 26, 2020

    Published Online: Apr. 28, 2020

    The Author Email: Zhu Linwei (lwzhu@siom.ac.cn)

    DOI:10.3788/AOS202040.1014004

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