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Chinese Journal of Lasers, Volume. 36, Issue s2, 78(2009)

Process of Continuous Membrane Micro-Deformable Mirror Based on SOI Wafer

[in Chinese]*, [in Chinese], and [in Chinese]
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    [in Chinese], [in Chinese], [in Chinese]. Process of Continuous Membrane Micro-Deformable Mirror Based on SOI Wafer[J]. Chinese Journal of Lasers, 2009, 36(s2): 78

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    Received: --

    Accepted: --

    Published Online: Dec. 30, 2009

    The Author Email: (dyqiao@nwpu.edu.cn)

    DOI:10.3788/cjl200936s2.0078

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology