Acta Optica Sinica, Volume. 43, Issue 19, 1900001(2023)

Development and Challenges of Lithographical Alignment Technologies

Jun Qiu1...2, Guanghua Yang1, Jing Li1,2,*, Zengxiong Lu1,2 and Minxia Ding1 |Show fewer author(s)
Author Affiliations
  • 1Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
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    Jun Qiu, Guanghua Yang, Jing Li, Zengxiong Lu, Minxia Ding. Development and Challenges of Lithographical Alignment Technologies[J]. Acta Optica Sinica, 2023, 43(19): 1900001

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    Paper Information

    Category: Reviews

    Received: Mar. 7, 2023

    Accepted: May. 6, 2023

    Published Online: Sep. 28, 2023

    The Author Email: Jing Li (lijing2018@ime.ac.cn)

    DOI:10.3788/AOS230637

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