Journal of Synthetic Crystals, Volume. 49, Issue 10, 1896(2020)

Simulation Optimization and Verification of a Microwave System for Microwave Plasma Chemical Vapor Deposition Device

WANG Xinyang1,2、*, CAO Guangyu1, and HUANG Chong1
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    WANG Xinyang, CAO Guangyu, HUANG Chong. Simulation Optimization and Verification of a Microwave System for Microwave Plasma Chemical Vapor Deposition Device[J]. Journal of Synthetic Crystals, 2020, 49(10): 1896

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    Paper Information

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    Received: --

    Accepted: --

    Published Online: Jan. 9, 2021

    The Author Email: WANG Xinyang (yvonne203here@163.com)

    DOI:

    CSTR:32186.14.

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