Journal of Synthetic Crystals, Volume. 49, Issue 10, 1896(2020)
Simulation Optimization and Verification of a Microwave System for Microwave Plasma Chemical Vapor Deposition Device
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WANG Xinyang, CAO Guangyu, HUANG Chong. Simulation Optimization and Verification of a Microwave System for Microwave Plasma Chemical Vapor Deposition Device[J]. Journal of Synthetic Crystals, 2020, 49(10): 1896
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Received: --
Accepted: --
Published Online: Jan. 9, 2021
The Author Email: WANG Xinyang (yvonne203here@163.com)
CSTR:32186.14.