High-Sensitivity Terahertz Microfluidic Sensor Based on Irregular U-type Structure

Zongren Li; Hu Deng; Jieping Yang; Quancheng Liu; Jin Guo; Liping Shang

doi:10.3788/AOS202141.1928003

Acta Optica Sinica, Volume. 41, Issue 19, 1928003(2021)

High-Sensitivity Terahertz Microfluidic Sensor Based on Irregular U-type Structure

Zongren Li¹, Hu Deng^1,2,3、*, Jieping Yang¹, Quancheng Liu¹, Jin Guo¹, and Liping Shang^1,2,3

Author Affiliations

¹School of Information Engineering, Southwest University of Science and Technology, Mianyang, Sichuan 621010, China

²Key Laboratory of Special Environment Robotics of Sichuan Province, Mianyang, Sichuan 621010, China

³Joint Laboratory for Extreme Conditions Matter Properties, Research Center of Laser Fusion, China Academy of Engineering Physics, Southwest University of Science and Technology, Mianyang, Sichuan 621010, China

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Figures & Tables(8)

Fig. 1. Terahertz microfluidic sensor. (a) Sensor structure; (b) unit metal structure

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Fig. 2. Equivalent circuit. (a) LC resonance; (b) dipole resonance

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Fig. 3. Changes of Q-factor and absorption with different structural parameters. (a) Absorption and reflection spectra of the sensor; (b) L₁; (c) L₂; (d) L₃; (e) W; (f) θ

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Fig. 4. Effects of microfluidic channel height and thickness of cap on the sensing properties. (a) Changes of Q-factor and absorption with different microfluidic channel height; (b) changes of sensitivity with different microfluidic channel height; (c) changes of sensitivity with different thickness of cap

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Fig. 5. Electric field distribution and surface current distribution of metal microstructure at the resonance frequency point. (a) Electric field distribution; (b) surface current distribution

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$Reflectance spectra of glucose solutions with different mass fractions$

Fig. 6. Reflectance spectra of glucose solutions with different mass fractions

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Table 1. Comparison of the proposed sensor with prior reported sensors
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Table 1. Comparison of the proposed sensor with prior reported sensors
Method Frequency /THz Q-factor Sensitivity /(GHz·RIU^-1)
Method in Ref. [16] 0.71 220
Method in Ref. [19] 1.0--1.2 192
Method in Ref. [20] 0.79 43--70 379
Method in Ref. [23] 0.4--0.7 153.17
Proposed method 0.99 24 313

Table 2. Refractive index of glucose solution with different mass fractions at 20 ℃^[25]
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Table 2. Refractive index of glucose solution with different mass fractions at 20 ℃^[25]
Mass fraction ofglucose solution /% 2 10 18 26 34
Refractive index 1.336 1.347 1.360 1.373 1.384

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Zongren Li, Hu Deng, Jieping Yang, Quancheng Liu, Jin Guo, Liping Shang. High-Sensitivity Terahertz Microfluidic Sensor Based on Irregular U-type Structure[J]. Acta Optica Sinica, 2021, 41(19): 1928003

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Paper Information

Category: Remote Sensing and Sensors

Received: Feb. 22, 2021

Accepted: Apr. 23, 2021

Published Online: Sep. 15, 2021

The Author Email: Hu Deng (denghu@swust.edu.cn)

DOI:10.3788/AOS202141.1928003

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology

Table 1. Comparison of the proposed sensor with prior reported sensors

Table 1. Comparison of the proposed sensor with prior reported sensors

Table 2. Refractive index of glucose solution with different mass fractions at 20 ℃[25]

Table 2. Refractive index of glucose solution with different mass fractions at 20 ℃[25]

Table 2. Refractive index of glucose solution with different mass fractions at 20 ℃^[25]

Table 2. Refractive index of glucose solution with different mass fractions at 20 ℃^[25]