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Acta Optica Sinica, Volume. 40, Issue 15, 1522002(2020)

Design of Reflective Projection Optics Used in Lithographic Focusing and Leveling System

Shengsheng Sun1,2、**, Dan Wang1, Yuejing Qi1,2, and Mingcheng Zong1,2、*
Author Affiliations
  • 1Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
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    Article index updated: Mar. 10, 2025

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    Shengsheng Sun, Dan Wang, Yuejing Qi, Mingcheng Zong. Design of Reflective Projection Optics Used in Lithographic Focusing and Leveling System[J]. Acta Optica Sinica, 2020, 40(15): 1522002

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Mar. 26, 2020

    Accepted: May. 6, 2020

    Published Online: Aug. 14, 2020

    The Author Email: Sun Shengsheng (sunshengsheng@ime.ac.cn), Zong Mingcheng (zongmingcheng@ime.ac.cn)

    DOI:10.3788/AOS202040.1522002

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology