[5] [5] HAO L,HUI T,HUANG L,et al, A large-stroke flexure fast tool servo with new displacement amplifier［C］//Munich,Germany:2017 IEEE International Conference on Advanced Intelligent Mechatronics (AIM),2017,

[8] [8] WANG Y M,ANG Y Q,ZHOU X Q,et al, A new 2-DOF fast tool servo for diamond turning of freeform optical surface[J]. Applied Mechanics and Materials,2012,101/102:1010-1013,

[9] [9] ZHU Z,ZHOU X,LIU Z,et al, Development of a piezoelectrically actuated two-degree-of-freedom fast tool servo with decoupled motions for micro-/nanomachining[J]. Precision Engineering,2014,38(4):809-820,

[10] [10] XIAO S,LI Y, Modeling and high dynamic compensating the rate-dependent hysteresis of piezoelectric actuators via a novel modified inverse preisach model[J]. IEEE Transactions on Control Systems Technology,2013,21(5):1549-1557,

[15] [15] KANG S Z,WU H T,LI Y,et al, A fractional-order normalized Bouc-Wen model for piezoelectric hysteresis nonlinearity[J]. IEEE/ASME Transactions on Mechatronics,2021(99):1,

[16] [16] RAKOTONDRABE M, Bouc–Wen modeling and inverse multiplicative structure to compensate hysteresis nonlinearity in piezoelectric actuators[J]. IEEE Transactions on Automation Science & Engineering,2011,8(2):428-431,

[17] [17] NASER M,IKHOUANE F, Hysteresis loop of the LuGre model[J]. Automatica,2015,59:48-53,