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Acta Optica Sinica, Volume. 12, Issue 9, 825(1992)

Investigation of soft X-ray transmission grating made by ion beam etching technique

[in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]2, [in Chinese]2, and [in Chinese]2
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Investigation of soft X-ray transmission grating made by ion beam etching technique[J]. Acta Optica Sinica, 1992, 12(9): 825

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    Paper Information

    Category: Optical Devices

    Received: Sep. 9, 1991

    Accepted: --

    Published Online: Sep. 11, 2007

    The Author Email:

    DOI:

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology