Fabrication of the high-<inline-formula><math display="inline" id="m1" xmlns:mml="http://www.w3.org/1998/Math/MathML"><mrow><mi mathvariant="bold-italic">Q</mi></mrow></math></inline-formula> Si<sub>3</sub>N<sub>4</sub> microresonators for soliton microcombs

Shuai Wan; Rui Niu; Jin-Lan Peng; Jin Li; Guang-Can Guo; Chang-Ling Zou; Chun-Hua Dong

doi:10.3788/COL202220.032201

Chinese Optics Letters, Volume. 20, Issue 3, 032201(2022)

Fabrication of the high- $Q$ Si₃N₄ microresonators for soliton microcombs

Shuai Wan^1,2, Rui Niu^1,2, Jin-Lan Peng³, Jin Li^1,2, Guang-Can Guo^1,2, Chang-Ling Zou^1,2, and Chun-Hua Dong^1,2、*

Author Affiliations

¹CAS Key Laboratory of Quantum Information, University of Science and Technology of China, Hefei 230026, China

²CAS Center For Excellence in Quantum Information and Quantum Physics, University of Science and Technology of China, Hefei 230026, China

³Center for Micro and Nanoscale Research and Fabrication, University of Science and Technology of China, Chinese Academy of Sciences, Hefei 230026, China

show less

Cited By

Article index updated: Feb. 7, 2025

Citation counts are provided from Web of Science. The counts may vary by service, and are reliant on the availability of their data.

The article is cited by 11 article(s) from Web of Science.

The article is cited by 3 article(s) CLP online library. (Some content might be in Chinese.)

Tools

Get Citation

Copy Citation Text

Shuai Wan, Rui Niu, Jin-Lan Peng, Jin Li, Guang-Can Guo, Chang-Ling Zou, Chun-Hua Dong, "Fabrication of the high- $Q$ Si₃N₄ microresonators for soliton microcombs," Chin. Opt. Lett. 20, 032201 (2022)

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites

Paper Information

Category: Optical Design and Fabrication

Received: Nov. 18, 2021

Accepted: Dec. 13, 2021

Published Online: Jan. 11, 2022

The Author Email: Chun-Hua Dong (chunhua@ustc.edu.cn)

DOI:10.3788/COL202220.032201

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology