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Journal of Synthetic Crystals, Volume. 52, Issue 5, 753(2023)

Optimization of KOH Etching for Single Crystal SiC by Dry Air

SUN Shuai1,2, SONG Huaping2, YANG Junwei2, WANG Wenjun2,3, QU Hongxia2, and JIAN Jikang1
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    SUN Shuai, SONG Huaping, YANG Junwei, WANG Wenjun, QU Hongxia, JIAN Jikang. Optimization of KOH Etching for Single Crystal SiC by Dry Air[J]. Journal of Synthetic Crystals, 2023, 52(5): 753

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    Received: Feb. 23, 2023

    Accepted: --

    Published Online: Jun. 11, 2023

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    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology