Opto-Electronic Engineering, Volume. 31, Issue 2, 34(2004)
Principle and Design of an IR Detector for a Novel Room Temperature MEMS
References(3)
[1] [1] ANTONI R.Infrared detectors:an overview[J].Infrared Physics & Technology,2002,43(3):187-210.
[3] [3] NORTON P R.Infrared detectors in the next millennium[A].SPIE,1999,3698:652-665.
[5] [5] WU J M,ZOU D S,GAO G,et al.Influences of various dielectric materials on p++ silicon diaphragm[A].Proceeding of Solid-State and Integrated-Circuit Technology [C].Beijing:PPTPH and IEEE press,2001,2:823-826.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Principle and Design of an IR Detector for a Novel Room Temperature MEMS[J]. Opto-Electronic Engineering, 2004, 31(2): 34
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