Chinese Journal of Lasers, Volume. 51, Issue 12, 1202404(2024)

Research Progress on Femtosecond Laser 3D Printing Technology of Inorganic Materials (Invited)

Zhengwei Hou1, Shaofeng Liu2, Linhan Lin2、*, Zhengcao Li1, and Hongbo Sun2,3
Author Affiliations
  • 1School of Materials Science and Engineering, Key Laboratory of Advanced Materials of Ministry of Education, Tsinghua University, Beijing 100084, China
  • 2Department of Precision Instrument, State Key Laboratory of Precision Measurement Technology and Instruments, Tsinghua University, Beijing 100084, China
  • 3College of Electronic Science & Engineering, State Key Laboratory of Integrated Optoelectronics, Jilin University, Changchun 130012, Jilin , China
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    Figures & Tables(14)
    Schematic diagram of femtosecond laser 3D printing technology of inorganic materials. (a) Polymer hybrid; (b) reaction of functional precursor; (c) inter-nanoparticle bonding
    Precursor-modified two-photon polymerization printing methods. (a) Scanning electron microscope (SEM) and fluorescence images of 3D structures of quantum dots synthesized in situ after two-photon polymerization[19]; (b) schematic diagram of metal precursor two-photon polymerization printing components[18]; (c) schematic diagram of modified POSS resin used for two-photon polymerization printing and heat treatment of glass structure[23]; (d) schematic diagram of TiO2 precursor two-photon polymerization printing[17]; (e) schematic diagram of YAG precursor two-photon polymerization printing components and optical-gain 3D structure[31]
    Nanoparticle-based two-photon polymerization printing methods. (a) Schematic diagram of silica nanoparticle resin two-photon polymerization printing (top right: schematic diagram of silica nanoparticle resin; bottom right: schematic diagram of crystallization transformation after high-temperature sintering)[38]; (b) schematic diagram of two-photon polymerization printing of magnetic Fe3O4 nanoparticles[39]; (c) fluorescence and SEM images of two-photon polymerization printing structure containing red, green, and blue (RGB) quantum dots[40]; (d) schematic diagram of two-photon polymerization printing of metal nanoparticles[37]
    Functional precursor laser printing methods based on non-photopolymerization. (a) Schematic diagram of metal structure reduction by laser printing, including three stages of nucleation, growth and aggregation[45]; (b) schematic diagram of 3D direct writing micro-nano glass structure based on HSQ[48]; (c) schematic diagram of printing silicon structure based on laser reduction APTES[49]; (d) schematic diagram of laser printing ZnO, Pt and Ag composition[50]
    Schematic diagram of laser-induced bonding printing between nanoparticles. (a) Schematic diagram of light stimuli-induced ligand change mechanism of nanoparticles; (b) change of interaction force between nanoparticles[51]
    Light-induced nanoparticle ligand desorption to achieve 3D micro-nano printing. (a) Schematic diagram of assembly mechanism of nanoparticles induced by photo-induced polarity change[54]; (b) schematic diagram of printing device and laser-induced AuNC ligand desorption and pyrolysis[55]
    Light-induced cross-linking between nanoparticles realizing 3D micro-nano printing. (a) Schematic diagram of PEB mechanism; (b) schematic diagram of 3D Pin mechanism; (c) SEM images of printed metal, oxide, and semiconductor micro-nano 3D structures; (d) EDS pictures of 3D printing structure by hybrid colloidal solution[60]
    Laser printing of metal 3D micro-nano structures and their applications. (a) SEM image of direct writing silver wire on curved surface and pictures of micro-nano electric heater[44]; (b) SEM image of printed metal structure and schematic diagram for holographic optical storage[68]; (c) schematic diagrams of different types Ni micro-nano spiral robots (top) and images demonstrating their capabilities of load carrying (bottom)[22]
    Laser printing of semiconductor 3D micro-nano structures and their applications. (a) Fluorescence images of RGB quantum dots pixel array printed by PEB (top) and quantum dot photodetector performance (bottom)[57]; (b) SEM and performance image of Pt-ZnO-Ag diode structure (top) and SEM and structural diagrams of Pt-ZnO-Ag memristor (bottom) [50]; (c) CdS quantum dots woodpile structure shown by microscope and SEM images[20]; (d) CdSe helical structure diagram (top left), chiral absorption spectrum (top right), simulated structure diagram (bottom left), and simulated chiral absorption spectrum (bottom right)[60]
    Laser printing of dielectric 3D micro-nano structures and their applications. (a) Schematic diagram of titanium dioxide photonic crystal structure (top) and electron microscope image (middle), showing band gap blue shift with decreasing period (bottom)[17]; (b) curves of hardness (left) and elastic modulus (right) of SiOC ceramic structure with different material ratios[26]; (c) SEM (top left) and spectrum (top right) images of 3D structure of Nd-doped YAG, showing that optical gain capability increases after high annealing temperature increases transparency (bottom)[31]
    Laser printing of silica 3D micro-nano structures and their applications. (a) Schematic diagram of DUV processing printed PDMS structure (top) and low RMS roughness glass lens diagrams (bottom)[24]; (b) high transparency spectrum of printed POSS glass[23]; (c) structure (top left) and performance (top right) demonstration of micro-annular whispering gallery modes optical resonator based on silica nanoparticles and emission spectrum of doped rare earth elements (bottom)[38]; (d) demonstration of direct writing ring resonator (left), transmittance curve before and after heat treatment (middle), and optical fiber end face processing capabilities (right) based on HSQ[48]
    Laser printing of heterogeneous materials. (a) Two-photon printing of polymer template (left), pyrolyzing template into conductive carbon structure (middle), electrodepositing nickel into carbon template, and milling excess metal with focused ion beam (right)[81]; (b) schematic diagram of laser printing heterostructure humanoid robot and its control (left) and capturing particles (right)[83]
    High-throughput laser 3D micro-nano printing and colloidal crystal laser printing. (a) Optical path schematic diagram (top) and printed structures image (bottom) of femtosecond pulses spatio-temporal focusing achieving high-precision and high-throughput printing [87]; (b) schematic diagram of light-sheet 3D micro-nano printing via two-colour two-step absorption and processing capabilities (top), printing parameter diagram (bottom left) and SEM image of printed structures (bottom right)[90]; (c) perovskite colloidal crystals exhibiting superfluorescence emission (left), electron microscope image of colloidal crystal assembly (middle) and superfluorescence emission spectrum image (right)[91]; (d) stable colloidal crystal structure based on bisazide molecules (left) and transmission electron microscope (TEM) image of assembly structure (right)[94]; (e) nanoparticles with complementary DNA ligands achieving orderly assembly under photothermal action[96]; (f) 3D colloidal crystal structure formed by sacrificial scaffold method (top) and demonstration of adjustable structural color (bottom)[97]
    • Table 1. Summary of femtosecond laser 3D printing of inorganic materials

      View table

      Table 1. Summary of femtosecond laser 3D printing of inorganic materials

      Printing

      mechanism

      ComponentsResolutionMaterialsAdvantagesDisadvantagesRef.
      Photopoly‐merization

      Photoresist

      and inorganic

      precursors

      ≥100 nm (oxide);

      ≥25 nm (metal)

      Semiconductor/

      oxide/metal

      Rich variety of precursor molecules; easily forming a homogeneous mixture with photoresist; high resolutionLow proportion of inorganic materials; difficult to form non-oxide compounds; post-processing can cause irreversible damage to structure17-182123-242831

      Photoresist

      and inorganic

      nanoparticles

      ≥80 nm

      Semiconductor/

      oxide/metal

      Comprehensive coverage of inorganic material types; excellent performance of nanoparticlesInorganic proportion is less than 50%; nanoparticle surface ligands need to be specifically designed

      [38,

      40-41]

      Inorganic

      precursor

      printing

      Inorganic

      precursor

      ≥450 nm

      (Si);≥26 nm

      (SiO2);

      ≥300 nm

      (metal)

      Si/oxide/metalPrinting inorganic materials with high purityLimited types of inorganic materials for printing; some precursors require high laser power for printing

      [44,

      47-49]

      Ligand

      desorption of

      nanoparticle

      Nanoparticle

      (and initiator)

      ≥38 nm

      (ZrO2);

      ≥340 nm

      (metal)

      ZrO2/metalHigh proportion of inorganic materials; high resolution and ultra-high printing speed (ZrO2Limited types of nanoparticles for printing54-55
      PEB

      Semiconductor

      QDs or metal

      nanoparticle

      solution

      ≥77 nm

      Semiconductor/

      metal

      Based on commercial printing solutions requiring no further processing; high proportion of inorganic components; high resolution; can be printed heterogeneouslyDue to energy level matching mechanism, types of printed nanoparticles are limited57
      3D Pin

      Nanoparticle

      and crosslinker

      ≥150 nm

      Semiconductor/

      oxide/metal

      Applicable to almost all nanoparticles; high proportion of inorganic components; nanoparticle properties are maintainedCross-linking molecules are expensive or difficult to synthesize60
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    Zhengwei Hou, Shaofeng Liu, Linhan Lin, Zhengcao Li, Hongbo Sun. Research Progress on Femtosecond Laser 3D Printing Technology of Inorganic Materials (Invited)[J]. Chinese Journal of Lasers, 2024, 51(12): 1202404

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    Paper Information

    Category: Laser Micro-Nano Manufacturing

    Received: Feb. 20, 2024

    Accepted: Apr. 1, 2024

    Published Online: Jun. 5, 2024

    The Author Email: Lin Linhan (linlh2019@mail.tsinghua.edu.cn)

    DOI:10.3788/CJL240603

    CSTR:32183.14.CJL240603

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