Chinese Journal of Lasers, Volume. 51, Issue 12, 1202404(2024)
Research Progress on Femtosecond Laser 3D Printing Technology of Inorganic Materials (Invited)
Fig. 1. Schematic diagram of femtosecond laser 3D printing technology of inorganic materials. (a) Polymer hybrid; (b) reaction of functional precursor; (c) inter-nanoparticle bonding
Fig. 2. Precursor-modified two-photon polymerization printing methods. (a) Scanning electron microscope (SEM) and fluorescence images of 3D structures of quantum dots synthesized in situ after two-photon polymerization[19]; (b) schematic diagram of metal precursor two-photon polymerization printing components[18]; (c) schematic diagram of modified POSS resin used for two-photon polymerization printing and heat treatment of glass structure[23]; (d) schematic diagram of TiO2 precursor two-photon polymerization printing[17]; (e) schematic diagram of YAG precursor two-photon polymerization printing components and optical-gain 3D structure[31]
Fig. 3. Nanoparticle-based two-photon polymerization printing methods. (a) Schematic diagram of silica nanoparticle resin two-photon polymerization printing (top right: schematic diagram of silica nanoparticle resin; bottom right: schematic diagram of crystallization transformation after high-temperature sintering)[38]; (b) schematic diagram of two-photon polymerization printing of magnetic Fe3O4 nanoparticles[39]; (c) fluorescence and SEM images of two-photon polymerization printing structure containing red, green, and blue (RGB) quantum dots[40]; (d) schematic diagram of two-photon polymerization printing of metal nanoparticles[37]
Fig. 4. Functional precursor laser printing methods based on non-photopolymerization. (a) Schematic diagram of metal structure reduction by laser printing, including three stages of nucleation, growth and aggregation[45]; (b) schematic diagram of 3D direct writing micro-nano glass structure based on HSQ[48]; (c) schematic diagram of printing silicon structure based on laser reduction APTES[49]; (d) schematic diagram of laser printing ZnO, Pt and Ag composition[50]
Fig. 5. Schematic diagram of laser-induced bonding printing between nanoparticles. (a) Schematic diagram of light stimuli-induced ligand change mechanism of nanoparticles; (b) change of interaction force between nanoparticles[51]
Fig. 7. Light-induced cross-linking between nanoparticles realizing 3D micro-nano printing. (a) Schematic diagram of PEB mechanism; (b) schematic diagram of 3D Pin mechanism; (c) SEM images of printed metal, oxide, and semiconductor micro-nano 3D structures; (d) EDS pictures of 3D printing structure by hybrid colloidal solution[60]
Fig. 8. Laser printing of metal 3D micro-nano structures and their applications. (a) SEM image of direct writing silver wire on curved surface and pictures of micro-nano electric heater[44]; (b) SEM image of printed metal structure and schematic diagram for holographic optical storage[68]; (c) schematic diagrams of different types Ni micro-nano spiral robots (top) and images demonstrating their capabilities of load carrying (bottom)[22]
Fig. 9. Laser printing of semiconductor 3D micro-nano structures and their applications. (a) Fluorescence images of RGB quantum dots pixel array printed by PEB (top) and quantum dot photodetector performance (bottom)[57]; (b) SEM and performance image of Pt-ZnO-Ag diode structure (top) and SEM and structural diagrams of Pt-ZnO-Ag memristor (bottom) [50]; (c) CdS quantum dots woodpile structure shown by microscope and SEM images[20]; (d) CdSe helical structure diagram (top left), chiral absorption spectrum (top right), simulated structure diagram (bottom left), and simulated chiral absorption spectrum (bottom right)[60]
Fig. 10. Laser printing of dielectric 3D micro-nano structures and their applications. (a) Schematic diagram of titanium dioxide photonic crystal structure (top) and electron microscope image (middle), showing band gap blue shift with decreasing period (bottom)[17]; (b) curves of hardness (left) and elastic modulus (right) of SiOC ceramic structure with different material ratios[26]; (c) SEM (top left) and spectrum (top right) images of 3D structure of Nd-doped YAG, showing that optical gain capability increases after high annealing temperature increases transparency (bottom)[31]
Fig. 11. Laser printing of silica 3D micro-nano structures and their applications. (a) Schematic diagram of DUV processing printed PDMS structure (top) and low RMS roughness glass lens diagrams (bottom)[24]; (b) high transparency spectrum of printed POSS glass[23]; (c) structure (top left) and performance (top right) demonstration of micro-annular whispering gallery modes optical resonator based on silica nanoparticles and emission spectrum of doped rare earth elements (bottom)[38]; (d) demonstration of direct writing ring resonator (left), transmittance curve before and after heat treatment (middle), and optical fiber end face processing capabilities (right) based on HSQ[48]
Fig. 12. Laser printing of heterogeneous materials. (a) Two-photon printing of polymer template (left), pyrolyzing template into conductive carbon structure (middle), electrodepositing nickel into carbon template, and milling excess metal with focused ion beam (right)[81]; (b) schematic diagram of laser printing heterostructure humanoid robot and its control (left) and capturing particles (right)[83]
Fig. 13. High-throughput laser 3D micro-nano printing and colloidal crystal laser printing. (a) Optical path schematic diagram (top) and printed structures image (bottom) of femtosecond pulses spatio-temporal focusing achieving high-precision and high-throughput printing [87]; (b) schematic diagram of light-sheet 3D micro-nano printing via two-colour two-step absorption and processing capabilities (top), printing parameter diagram (bottom left) and SEM image of printed structures (bottom right)[90]; (c) perovskite colloidal crystals exhibiting superfluorescence emission (left), electron microscope image of colloidal crystal assembly (middle) and superfluorescence emission spectrum image (right)[91]; (d) stable colloidal crystal structure based on bisazide molecules (left) and transmission electron microscope (TEM) image of assembly structure (right)[94]; (e) nanoparticles with complementary DNA ligands achieving orderly assembly under photothermal action[96]; (f) 3D colloidal crystal structure formed by sacrificial scaffold method (top) and demonstration of adjustable structural color (bottom)[97]
|
Get Citation
Copy Citation Text
Zhengwei Hou, Shaofeng Liu, Linhan Lin, Zhengcao Li, Hongbo Sun. Research Progress on Femtosecond Laser 3D Printing Technology of Inorganic Materials (Invited)[J]. Chinese Journal of Lasers, 2024, 51(12): 1202404
Category: Laser Micro-Nano Manufacturing
Received: Feb. 20, 2024
Accepted: Apr. 1, 2024
Published Online: Jun. 5, 2024
The Author Email: Lin Linhan (linlh2019@mail.tsinghua.edu.cn)
CSTR:32183.14.CJL240603