Fig. 1. Flowchart of preparation of flexible gallium oxide UV detector

Fig. 2. Sample placement diagram

Fig. 3. XRD θ-2θ spectra of bare PEN substrate and Ga₂O₃ films grown on PEN substrate

Fig. 4. XPS spectra of the prepared Ga₂O₃ film

Fig. 5. The transmission spectrum of Ga₂O₃ film on PEN substrate and single PEN sample

Fig. 6. Spectral response of flexible gallium oxide photodetector at 200~400 nm

Fig. 7. SEM images of the prepared sample surface

Fig. 8. I-V characteristic curve of Ga₂O₃ UV detector before and after 20 000 bending

Fig. 9. I-t characteristic curve of the Ga₂O₃ UV detector's switching response to 254 nm UV light under a bias voltage of 10 V after 20 000 times bending

Fig. 10. Switching time fitting of the Ga₂O₃ UV detector after 20 000 times bending