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Opto-Electronic Engineering, Volume. 34, Issue 8, 72(2007)

High acceleration ultra-precision measurement model in laser heterodyne interferometry

[in Chinese]1, [in Chinese]1, [in Chinese]2, [in Chinese]1, [in Chinese]1, [in Chinese]1, and [in Chinese]1
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    [6] [6] ZYGO Corporation.ZMI 4004TM measurement board[EB/OL].http://www.zygo.com/products/zmi/zmi4004_ds.pdf,2006-07-01.

    [7] [7] Heilmann R K,Konkola P T,Chen C G,et al.Relativistic corrections in displacement measuring interferometry[J].J.Vac.Sci.Technol,2000,B18(6):3277-3281.

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. High acceleration ultra-precision measurement model in laser heterodyne interferometry[J]. Opto-Electronic Engineering, 2007, 34(8): 72

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    Paper Information

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    Received: Aug. 11, 2006

    Accepted: --

    Published Online: Nov. 14, 2007

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology