Fig. 1. (a) Structure of Si MRM, (b) cross section of Si MRM, and (c) measured electro-optic S21 at five different detuning values^[8].

Fig. 2. Measurement setup.

Fig. 3. (a) Narrowband transmission spectrum of Si MRM and (b) eye diagrams for various data rates at 1553.395-nm input wavelength.

Fig. 4. Transmission spectra measured under data modulation with different data patterns: (a) PRBS 2³¹-1 and (b) “1010” data. (c) Resonance wavelength shift dependence on data rates for two different data patterns.

Fig. 5. (a) Transmission spectra measured under data modulation with different modulation voltages and (b) resonance wavelength shift dependence on modulation voltages.

Fig. 6. (a) Transmission spectra with data modulation at 5 and 25 Gb/s and (b) eye diagrams at different conditions.

Fig. 7. Electrical model of Si MRM.