Fig. 1. Top hat shaped harmonic reducer components

Fig. 2. Cloud chart of flexspline strain distribution

Fig. 3. Thin film temperature sensor preparation position

Fig. 4. Flexspline strain analysis

Fig. 5. Circumferential strain curves

Fig. 6. Schematic diagram of temperature sensor sensitive grid

Fig. 7. Thin film temperature sensor

Fig. 8. Temperature sensitivity test system

Fig. 9. Torque sensitivity test system

Fig. 10. Temperature calibration results

Fig. 11. Torque calibration results

Fig. 12. Static temperature measurement conditions of thin-film temperature sensors

Fig. 13. Dynamic temperature measurement with thin-film temperature sensors

Fig. 14. Repetitive testing of thin film temperature sensor