Journal of Semiconductors, Volume. 41, Issue 3, 032302(2020)
Fabrication of flexible AlGaInP LED
Fig. 1. (Color online) Illustration of fabrication process of flexible LEDs. (a) After Ti/Au layer deposition and photolithography, the bottom n-electrodes are patterned on the polyimide substrate. (b) Application of conductive silver paste. (c) Transfer of LED chips from PVC film to polyimide substrate. (d) BCB coating and then photolithography to expose the top electrodes of LEDs. (e) Top metal layer deposition. (f) Patterned top p-electrodes after photolithography. (g) Schematic cross section of flexible LEDs.
Fig. 2. (Color online) (a) Metallurgical microscope image of the transferred LED arrays under the current injection of 1 mA. (b) and (c) Side-view images of concave and convex bent LED arrays, respectively.
Fig. 3. (Color online) (a) Comparison of forward
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Qiaoli Liu, Yajie Feng, Huijun Tian, Xiaoying He, Anqi Hu, Xia Guo. Fabrication of flexible AlGaInP LED[J]. Journal of Semiconductors, 2020, 41(3): 032302
Category: Articles
Received: Aug. 3, 2019
Accepted: --
Published Online: Sep. 10, 2021
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