[1] [1] MAIMAN T H. Stimulated optical radiation in ruby［J］. Nature, 1960, 187(4736): 493-494.

[2] [2] XIAO K H, LI M A, XIE Y, et al. Research status and prospect of femtosecond laser processing materials［J］. Journal of University of Science and Technology Liaoning, 2019, 42(3): 179-185（in Chin-ese）.

[3] [3] SPENCE D E, KEAN P N, SIBBETT W. 60-fsec pulse generation from a self-mode-locked Ti∶sapphire laser［J］. Optics Letters, 1991, 16(1): 42-44.

[4] [4] SQUIER J, COE S, CLAY K, et al. An alexandrite pumped Nd∶glass regenerative amplifier for chirped pulse amplification［J］. Optics Communications, 1992, 92(1/3): 73-78.

[5] [5] LITTLE D J, AMS M, DEKKER P, et al. Femtosecond laser modification of fused silica: The effect of writing polarization on Si—O ring structure［J］. Optics Express, 2008, 16(24): 20029-20037.

[6] [6] MAHMOOD A S, VENKATAKRISHNAN K, TAN B. 3-D aluminum nanostructure with microhole array synthesized by femtosecond laser radiation for enhanced light extinction［J］. Nanoscale Research Le-tters, 2013, 8(1): 477-477.

[7] [7] WANG Zh J, JIA W, NI X Ch, et al. Numerical simulation of the heat affected zone of nickel ablated with femtosecond laser［J］. Laser Technology, 2007, 31(6): 578-580（in Chinese）.

[8] [8] GAO Sh M, YAN K Zh, HAN P G, et al. Study on periodic structures on Si surface induced by femtosecond laser［J］. Laser Techno-logy, 2015, 39(3):395-398（in Chinese）.

[9] [9] YANG H, YU X Ch, WU Y F, et al. Research progress and application of femtosecond laser in micromachining［J］. Applied Laser, 2019, 39(2):346-354（in Chinese）.

[10] [10] LI W B. Research on femtosecond laser processing of silicon carbide ceramic material［D］. Harbin: Harbin Institute of Technology, 2011:2-6（in Chinese）.

[11] [11] YANG J J. Femtosecond laser “cold” micro-machining and its advanced applications［J］. Laser & Optoelectronics Progress, 2004, 41(3): 42-52（in Chinese）.

[12] [12] ZHU P F. Research on ultrafast laser processing technology［D］. Xi’an: X’an Technological University, 2014:10-36（in Chinese）.

[13] [13] ZHOU Y L. Study on mechanism and process of laser processing 3-D printing titanium alloy sheet［D］. Beijing: Beijing University of Technology, 2018: 2-35（in Chinese）.

[14] [14] PECHOLT B, VENDAN M, DONG Y Y, et al. Ultrafast laser micromachining of 3C-SiC thin films for MEMS device fabrication［J］. The International Journal of Advanced Manufacturing Technology, 2008, 39(3): 239-250.

[15] [15] LI X X, JIA T Q, FENG D H, et al. Ablation mechanism of alumina under ultrashort pulse laser irradiation［J］. Acta Physica Sinica, 2004, 53(7): 2154-2158（in Chinese）.

[16] [16] SUN Y Zh, LIN X H, CHEN Y F. Theoretical model investigation about the mechanism of ultrashort-pulse laser ablation fused silica［J］. Journal of Functional Materials and Devices, 2008, 14(1): 38-42（in Chinese）.

[17] [17] ANISIMOV S I, KAPELIOVICH B L, PEMLMAN T L. Electron emission from metal surfaces exposed to ultrashort laser pulses［J］. Soviet Journal of Experimental and Theoretical Physics, 1974, 39: 375-377.

[18] [18] XU B, WU X Y, LING Sh Q, et al. Numerical simulation of thermal electron emission in metal films ablated by multi-pulse femtose-cond laser［J］. Laser & Optoelectronics Progress, 2012, 49(8): 083201（in Chinese）.

[19] [19] XU Y, NING R X, BAO J, et al. Mechanism analysis of ablation of metal by femtosecond pulse laser［J］. Laser & Infrared, 2019, 49(4): 432-437（in Chinese）.

[20] [20] WANG S Y, REN Y P, CHENG Ch W, et al. Micromachining of copper by femtosecond laser pulses［J］. Applied Surface Science, 2013, 265: 302-308.

[21] [21] SAGHEBFAR M, TEHRANI M K, DARBANI S M R, et al. Erratum to: Femtosecond pulse laser ablation of chromium: experimental results and two-temperature model simulations［J］. Applied Physics, 2017, A123(2): 130(2017).

[22] [22] LI J L, WANG B F, WANG Zh W, et al. Thermal relaxation in ablation process of aluminum sheet by femtosecond laser ［J］. Hydromechatronics Engineering, 2019, 47(24): 92-97.

[23] [23] LI Q, LAO H, LIN J, et al. Study of femtosecond ablation on aluminum film with 3-D two-temperature model and experimental verifications［J］. Applied Physics, 2011, A105(1): 125-129.

[24] [24] ZHANG W K, DAI W, ZHENG Zh Zh, et al. Numerical simulation and verification of free-surface evolution in laser processing of H13 tool steel［J］. Chinese Journal of Lasers, 2019, 46(7): 0702002（in Chinese）.

[25] [25] SHAN D Y, CHEN T. Simulation and process research of laser po-lishing die steel［J］. Electromachining & Mould, 2019(5): 44-50（in Chinese）.

[26] [26] WANG T, WANG J, YAO T, et al. Modeling and simulation of metal surface in laser polishing［J］. Laser & Infrared, 2019, 49(9): 1068-1074（in Chinese）.

[27] [27] VADALI M, MA C, DUFFLE N A, et al. Pulsed laser micro poli-shing: Surface prediction model［J］. Journal of Manufacturing Processes, 2012, 14(3): 307-315.

[28] [28] ZHOU L, JIANG Y, ZHANG P, et al. Numerical and experimental investigation of morphological modification on fused silica using CO2 laser ablation［J］. Materials (Basel), 2019, 12(24): 4109.

[29] [29] XU G, DAI Y, CUI J, et al. Simulation and experiment of femtose-cond laser polishing quartz material［J］. Integrated Ferroelectrics, 2017, 181(1): 60-69.

[30] [30] ZHANG X Zh, XIA F, XU J J. The mechanisms and research progress of laser fabrication technologies beyond diffraction limit［J］. Acta Physica Sinica, 2017, 66(14): 144207（in Chinese）.

[31] [31] GUAY J M, CHARRON M, CT G, et al. Enhanced plasmonic coloring of silver and formation of large laser-induced periodic surface structures using multi-burst picosecond pulses［J］. Advanced Optical Materials, 2016, 6(17): 1800189.

[32] [32] HU G, GUAN K, LU L, et al. Engineered functional surfaces by laser microprocessing for biomedical applications［J］. Engineering, 2018, 4(6): 822-830.

[33] [33] DJOUDER M, LAMROUS O, MITICHE M D, et al. Electromagnetic particle-in-cell (PIC) method for modeling the formation of metal surface structures induced by femtosecond laser radiation［J］. A-pplied Surface Science, 2013, 280: 711-714.

[34] [34] KODAMA S, YAMAGUCHI H, SHIMADA K, et al. Control of short-pulsed laser induced periodic surface structures with machining-picosecond laser nanotexturing with magnetic abrasive finishing［J］. Precision Engineering, 2019, 60: 428-436.

[35] [35] RUDENKO A, MAUCLAIR C, GARRELIE F, et al. Amplification and regulation of periodic nanostructures in multipulse ultrashort laser-induced surface evolution by electromagnetic-hydrodynamic simulations［J］. Physical Review, 2019, B99, 235412.

[36] [36] ABOUSALEH A, KARIM E T, MAURICE C, et al. Spallation-induced roughness promoting high spatial frequency nanostructure formation on Cr［J］. Applied Physics, 2018, A124(4): 308(2018).

[37] [37] YANG Q B, WANG H J, HUANG Y, et al. Experimental study on nanosecond laser processing of Ti6Al4V alloy ［J］. Optical Technique, 2019, 45(2): 245-250（in Chinese）.

[38] [38] YANG Y, LOU R, CHEN X, et al. Influence of energy fluence and overlapping rate of femtosecond laser on surface roughness of Ti-6Al-4V［J］. Optical Engineering, 2019, 58(10): 106107.

[39] [39] PERRY T L, WERSCHMOELLER D, LI X, et al. Pulsed laser po-lishing of micro-milled Ti6Al4V samples［J］. Journal of Manufacturing Processes, 2009, 11(2): 74-81.

[40] [40] LIANG Ch Y, HU Y Zh, LIU N, et al. Laser polishing of Ti6Al4V fabricated by selective laser melting［J］. Metals, 2020, 10(2): 191.

[41] [41] CHEN F, LIU Q M, DU P, et al. Experimental study on femtosecond laser processing of GH4099 honeycomb core［J］. Aeronautical Manufacturing Technology, 2019, 62(s2): 46-51（in Chinese）.

[42] [42] HUANG J F, WEI X, XIE X Zh, et al. Research on influences of condition parameters on laser polishing process［J］. Laser & Opto-electronics Progress, 2008, 45(12): 20-24（in Chinese）.

[43] [43] PIMENOV S M, KONONENKO V V, RALCHENKO V G, et al. Laser polishing of diamond plates［J］. Applied Physics, 1999, A69(1): 81-88.

[44] [44] OSTHOLT R, WILLENBORG E, WISSENBACH K. Laser polishing of metallic freeform surfaces［J］. Journal of Laser Applications, 2010, 2010(1): 597-603.

[45] [45] JULIANA D S S, SEIFERT H J, WILHELM P. Laser surface modification and polishing of additive manufactured metallic parts［J］. Procedia CIRP, 2018, 74: 280-284.

[46] [46] CHEN Y, TSAI W, LIU S, et al. Picosecond laser pulse polishing of ASP23 steel［J］. Optics and Laser Technology, 2018, 107: 180-185.

[47] [47] GLOOR S, LUTHY W, WEBER H P. Laser polishing of extended diamond films［J］. Diamond Films and Technology, 1997, 7(4):233-240.