[1] Sun G Y[D]. High-aspect-ratio micro-and nanostructures: simulation, fabrication, and application, 3-9(2010).

[2] Mu J L, Guo M X, Liu B et al. Fabrication methods and applications of silicon micro/nanometer structures with high aspect ratio[J]. Semiconductor Technology, 38, 321-327(2013).

[3] Kayes B M, Filler M A, Putnam M C et al. Growth of vertically aligned Si wire arrays over large areas (>1 cm2) with Au and Cu catalysts[J]. Applied Physics Letters, 91, 103110(2007).

[4] Chamran F, Yeh Y, Min H S et al. Fabrication of high-aspect-ratio electrode arrays for three-dimensional microbatteries[J]. Journal of Microelectromechanical Systems, 16, 844-852(2007).

[5] Cui J, Li Y, Xiong Y. Processing approach of deep micro slit by micro EDM[J]. Journal of Beijing University of Technology, 36, 289-293(2010).

[6] Yu W, Desmulliez M P Y, Drufke A et al. High-aspect-ratio metal microchannel plates for microelectronic cooling applications[J]. Journal of Micromechanics and Microengineering, 20, 025004(2010).

[7] Yang Q, Zhao J Q, Huang Y P et al. A diamond made microchannel heat sink for high-density heat flux dissipation[J]. Applied Thermal Engineering, 158, 113804(2019).

[8] Jiang H T, Cui J L, Yin D P et al. Femtosecond laser processing technology of diamond micro-channel heat sink based on radar power module[J]. China Mechanical Engineering, 32, 261-268(2021).

[9] Zhang Z, Zhang Q L, Wang Q W et al. Investigation on the material removal behavior of single crystal diamond by infrared nanosecond pulsed laser ablation[J]. Optics & Laser Technology, 126, 106086(2020).

[10] Coe S E, Sussmann R S. Optical, thermal and mechanical properties of CVD diamond[J]. Diamond and Related Materials, 9, 1726-1729(2000).

[11] Forsberg P, Karlsson M. High aspect ratio optical gratings in diamond[J]. Diamond and Related Materials, 34, 19-24(2013).

[12] Yuan M W. Research progress of diamond based electronic devices[J]. Micronanoelectronic Technology, 49, 643-672(2012).

[13] Wang P, Zhang F L, Liu W G et al. Experimental study on laser processing arrayed conical micro-holes of CVD diamond films[J]. Laser & Optoelectronics Progress, 53, 111402(2016).

[14] Kawasegi N, Niwata T, Morita N et al. Improving machining performance of single-crystal diamond tools irradiated by a focused ion beam[J]. Precision Engineering, 38, 174-182(2014).

[15] Martin A A, Bishop J, Burnett W et al. Ultra-high aspect ratio pores milled in diamond via laser, ion and electron beam mediated processes[J]. Diamond and Related Materials, 105, 107806(2020).

[16] Mouhamadali F, Equis S, Saeidi F et al. Nanosecond pulsed laser-processing of CVD diamond[J]. Optics and Lasers in Engineering, 126, 105917(2020).

[17] Chen N, Yan B, Li Z J et al. Gaussian pulsed laser etching of CVD diamonds[J]. Chinese Journal of Lasers, 47, 1202007(2020).

[18] Han Y, Ma Y P, Wang H H et al. Material removal rate of nano-diamond coating ablated by femtosecond laser[J]. Laser & Optoelectronics Progress, 58, 1114001(2021).

[19] Kononenko V V, Kononenko T V, Pimenov S M et al. Effect of the pulse duration on graphitisation of diamond during laser ablation[J]. Quantum Electronics, 35, 252-256(2005).

[20] Xing Y Q, Liu L, Hao X Q et al. Micro-channels machining on polycrystalline diamond by nanosecond laser[J]. Optics & Laser Technology, 108, 333-345(2018).

[21] Zhang Z, Zhang Q L, Wang Q W et al. Surface microstructuring of single crystalline diamond based on the accumulated energy homogenization in the nanosecond pulsed laser ablation[J]. Optics & Laser Technology, 138, 106839(2021).

[22] Tu J P, Liu J L, Shao S W et al. Synthesis, structure, and optical properties of a high-quality single-crystal diamond[J]. Acta Optica Sinica, 40, 0631001(2020).

[23] Odake S, Ohfuji H, Okuchi T et al. Pulsed laser processing of nano-polycrystalline diamond: a comparative study with single crystal diamond[J]. Diamond and Related Materials, 18, 877-880(2009).

[24] Wen Q L, Wei X Y, Wang H L et al. Characteristics and mechanism of CVD single crystal diamond processed by picosecond laser[J]. Acta Photonica Sinica, 50, 0650113(2021).

[25] Wang H L, Wen Q L, Xu X P et al. Ablation characteristics and material removal mechanisms of a single-crystal diamond processed by nanosecond or picosecond lasers[J]. Optics Express, 29, 22714-22731(2021).

[26] Iwai Y, Mizuno T, Arai T et al. Scribing characteristics of ceramics with Nd: YLF laser[J]. Proceedings of SPIE, 5063, 509-513(2003).

[27] Xie X Z, Li L J, Wei X et al. Evaporative front of laser cutting PMMA[J]. Chinese Journal of Lasers, 35, 925-930(2008).