Study on Film Thickness Distribution of Hemispherical Lens

ZHU Yuan-qiang

OPTICS & OPTOELECTRONIC TECHNOLOGY, Volume. 18, Issue 1, 59(2020)

ZHU Yuan-qiang

Author Affiliations

[in Chinese]

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References(6)

[1] [1] K H Guenther. Optical thin films deposited by energetic particle processes［C］. SPIE, 1992, 782: 344-355.

K H Guenther. Optical thin films deposited by energetic particle processes［C］. SPIE, 1992, 782: 344-355.

[3] [3] Francisco Villa, Octavio Pompa. Emission pattern of real vapor source in high vacuum: an overview［J］. Applied Optics, 1999, 38(4): 695-703.

Francisco Villa, Octavio Pompa. Emission pattern of real vapor source in high vacuum: an overview［J］. Applied Optics, 1999, 38(4): 695-703.

[4] [4] Francisco Villa, Amalia Martinez, et al. Correction masks for thickness uniformity in large-area thin film［J］. Applied Optics, 2003, 39(10): 1602-1610.

Francisco Villa, Amalia Martinez, et al. Correction masks for thickness uniformity in large-area thin film［J］. Applied Optics, 2003, 39(10): 1602-1610.