Acta Optica Sinica, Volume. 25, Issue 4, 567(2005)
Study of Silicon Oxynitride Film Deposited by RF Magnetron Sputtering
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Study of Silicon Oxynitride Film Deposited by RF Magnetron Sputtering[J]. Acta Optica Sinica, 2005, 25(4): 567
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