Heat accumulation effects in femtosecond laser-induced subwavelength periodic surface structures on silicon

Qiang Fu; Jing Qian; Guande Wang; Quanzhong Zhao

doi:10.3788/COL202321.051402

Chinese Optics Letters, Volume. 21, Issue 5, 051402(2023)

Heat accumulation effects in femtosecond laser-induced subwavelength periodic surface structures on silicon Editors' Pick

Qiang Fu^1,2, Jing Qian^1,2, Guande Wang^1,2, and Quanzhong Zhao^1,2、*

Author Affiliations

¹State Key Laboratory of High Field Laser Physics and CAS Center for Excellence in Ultra-intense Laser Science, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

²University of Chinese Academy of Sciences, Beijing 100049, China

show less

Cited By

Article index updated: Apr. 16, 2025

Citation counts are provided from Web of Science. The counts may vary by service, and are reliant on the availability of their data.

The article is cited by 4 article(s) from Web of Science.

The article is cited by 1 article(s) CLP online library. (Some content might be in Chinese.)

Tools

Get Citation

Copy Citation Text

Qiang Fu, Jing Qian, Guande Wang, Quanzhong Zhao, "Heat accumulation effects in femtosecond laser-induced subwavelength periodic surface structures on silicon," Chin. Opt. Lett. 21, 051402 (2023)

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites

Paper Information

Category: Lasers, Optical Amplifiers, and Laser Optics

Received: Dec. 7, 2022

Accepted: Feb. 8, 2023

Published Online: May. 10, 2023

The Author Email: Quanzhong Zhao (zqz@siom.ac.cn)

DOI:10.3788/COL202321.051402

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology