Semiconductor Optoelectronics, Volume. 42, Issue 5, 716(2021)
Research on Manufacturing Process of Cylindrical Microlens Array Mold Based on Ultra-precision Cutting
[1] [1] Chou S Y, Krauss P R, Renstrom P J. Imprint lithography with 25[J]. Science, 1996, 272(5258): 85-87.
[2] [2] Bender M, Plachetka U, Ran J, et al. High resolution lithography with PDMS molds[J]. J. of Vacuum Science Technology B Microelectronics & Nanometer Structures, 2004, 22(6): 3229-3232.
[3] [3] Bender M, Fuchs A, Plachetka U, et al. Status and prospect of UV-nanoimprint technology—Science Direct[J]. Microelectronic Engin., 2006, 83(4-9): 827-830.
[8] [8] Wang Q D, Duan Y G, Lu B H, et al. Imprint template fabrication based on glass wet etching using a soft etching mask[J]. J. Micromech. Microeng., 2006, 16(3): 564-570.
[9] [9] Murphy P F, Morton K J, Fu Z, et al. Nanoimprint mold fabrication and replication by room-temperature conformal chemical vapor deposition[J]. Appl. Phys. Lett., 2007, 90(20): 163.
[11] [11] Zhou L, Dong X X, Lv G C, et al. Fabrication of concave microlens array diffuser films with a soft transparent mold of UV-curable polymer[J]. Optics Communications, 2015, 342: 167-172.
[12] [12] Ting C J, Huang M C, Tsai H Y, et al. Low cost fabrication of the large-area anti-reflection films from polymer by nanoimprint/hot-embossing technology[J]. Nanotechnology, 2008, 19(20): 205301.
[13] [13] Xiong H, Wang L, Wang Z. Chalcogenide microlens arrays fabricated using hot embossing with soft PDMS stamps[J]. J. of Non-Crystalline Solids, 2019, 521: 119542.
[15] [15] Zhang X D, Li L H, Li Z X, et al. Highly uniform manufacturing method for large-area microlens arrays[J]. Inter. J. of Advanced Manufacturing Technol., 2018, 95: 99-108.
[16] [16] Liu Y T, Qiao Z, Qu D, et al. Experimental investigation on form error for slow tool servo diamond turning of micro lens arrays on the roller mold[J]. Materials, 2018, 11(10): 1816.
[17] [17] Suzuki H, Moriwaki T, Yamamoto Y, et al. Precision cutting of aspherical ceramic molds with micro PCD milling tool[J]. CIRP Annals-Manufacturing Technol., 2007, 56(1): 131-134.
[18] [18] Takino H, Oba T, Takeuchi Y, et al. Fabrication of spherical MLA mold by ultra-precision multiaxis-control milling[C]// Proc. of the 13th Inter. Conf. of the European Society for Precision Engineering and Nanotechnology, 2013: 101-104.
[19] [19] Johnson G R, Cook W H. A constitutive model and data for metals subjected to large strains, high strain rates and high temperatures[J]. Engineering Fracture Mechanics, 1983, 21: 541-548.
[20] [20] Johnson G R, Cook W H. Fracture characteristics of three metals subjected to various strains, strain rates, temperatures and pressures[J]. Engineering Fracture Mechanics, 1985, 21(1): 31-48.
Get Citation
Copy Citation Text
QING Jianhong, LI Yun. Research on Manufacturing Process of Cylindrical Microlens Array Mold Based on Ultra-precision Cutting[J]. Semiconductor Optoelectronics, 2021, 42(5): 716
Category:
Received: Jul. 17, 2021
Accepted: --
Published Online: Nov. 6, 2021
The Author Email: