Acta Photonica Sinica, Volume. 52, Issue 10, 1052414(2023)
On-chip Mid-infrared Indium Gallium Arsenic Suspended Waveguide Gas Sensors
[1] MIZAIKOFF B. Waveguide-enhanced mid-infrared chem/biosensors[J]. Chemical Society Reviews, 42, 8683-8699(2013).
[2] YOO K M, MIDKIFF J, ROSTAMIAN A et al. InGaAs membrane waveguide: a promising platform for monolithic integrated mid-infrared optical gas sensor[J]. ACS Sensors, 5, 861-869(2020).
[3] NIU Donghai, WANG Xibin, SUN Shiqi et al. Polymer/silica hybrid waveguide temperature sensor based on asymmetric Mach-Zehnder interferometer[J]. Journal of Optics, 20, 045803(2018).
[4] WANG Guiqiang, WANG Chuannan, SUN Shuqing. An optical waveguide sensor based on mesoporous silica films with a comparison to surface plasmon resonance sensors[J]. Sensors and Actuators B: Chemical, 255, 3400-3408(2018).
[5] HENDERSON B, KHODABAKHSH A, METSÄLÄ M et al. Laser spectroscopy for breath analysis: towards clinical implementation[J]. Applied Physics B, 124, 161(2018).
[6] CHRISTIAN K, MARTINEZ-HURTADO J L, ALEXANDRU P et al. Slow light enhanced gas sensing in photonic crystals[J]. Optical Materials, 76, 106-110(2018).
[7] HU Ting, DONG Bowei, LUO Xianshu et al. Silicon photonic platforms for mid-infrared applications (invited)[J]. Photonics Research, 5, 417-430(2017).
[8] PI Mingquan, ZHENG Chuantao, BI Ran et al. Design of a mid-infrared suspended chalcogenide/silica-on-silicon slot-waveguide spectroscopic gas sensor with enhanced light-gas interaction effect[J]. Sensors and Actuators B: Chemical, 297, 126732(2019).
[9] GUTIERREZ-ARROYO A, BAUDET E, BODIOU L et al. Optical characterization at 7.7 μm of an integrated platform based on chalcogenide waveguides for sensing applications in the mid-infrared[J]. Optics Express, 24, 23109-23117(2016).
[10] CHUNG C J, MIDKIFF J, YOO K M et al. InP-based polarization rotator-splitter for mid-infrared photonic integration circuits[J]. AIP Advances, 9, 015303(2019).
[11] CHAKRAVARTY S, MIDKIFF J, YOO K et al. Monolithic integration of quantum cascade laser, quantum cascade detector, and subwavelength waveguides for mid-infrared integrated gas sensing[C](2019).
[12] JUNG S Y, PALAFERRI D, ZHANG K et al. Belkin. Homogeneous photonic integration of mid-infrared quantum cascade lasers with low-loss passive waveguides on an InP platform[J]. Optica, 6, 1023-1030(2019).
[13] ALI R, EHSAN M K, HAMED D et al. Towards lab-on-chip ultrasensitive ethanol detection using photonic crystal waveguide operating in the mid-infrared[J]. Nanophotonics, 10, 1675-1682(2021).
[14] WANG Yuefeng, CHEN Weiwei, WANG Pengjun et al. Ultra-high-power-confinement-factor integrated mid-infrared gas sensor based on the suspended slot chalcogenide glass waveguide[J]. Sensors and Actuators B: Chemical, 347, 130466(2021).
[15] TOMBEZ L, ZHANG E J, ORCUTT J S et al. Methane absorption spectroscopy on a silicon photonic chip[J]. Optica, 4, 1322-1325(2017).
[16] PI Mingquan, HUANG Yijun, ZHAO Huan et al. Theoretical and experimental investigation of on-chip mid-infrared chalcogenide waveguide CH4 sensor based on wavelength modulation spectroscopy[J]. Sensors and Actuators B: Chemical, 362, 131782(2022).
[17] ZHENG Chuantao, YE Weilin, SANCHEZ N P et al. Development and field deployment of a mid-infrared methane sensor without pressure control using interband cascade laser absorption spectroscopy[J]. Sensors and Actuators B: Chemical, 244, 365-372(2017).
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Xueying WANG, Zhening ZHANG, Mingquan PI, Zihang PENG, Chuantao ZHENG, Fang SONG, Yue YANG, Yiding WANG. On-chip Mid-infrared Indium Gallium Arsenic Suspended Waveguide Gas Sensors[J]. Acta Photonica Sinica, 2023, 52(10): 1052414
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Received: Aug. 14, 2023
Accepted: Oct. 12, 2023
Published Online: Dec. 5, 2023
The Author Email: Yue YANG (yangyue@jlu.edu.cn)