Acta Photonica Sinica, Volume. 52, Issue 10, 1052414(2023)

On-chip Mid-infrared Indium Gallium Arsenic Suspended Waveguide Gas Sensors

Xueying WANG1,2, Zhening ZHANG1,2, Mingquan PI1,2, Zihang PENG1,2, Chuantao ZHENG1,2, Fang SONG1,2, Yue YANG1,2、*, and Yiding WANG1,2
Author Affiliations
  • 1State Key Laboratory of Integrated Optoelectronics,Jilin University Region,College of Electronic Science and Engineering,Jilin University,Changchun 130012,China
  • 2Jilin Provincial Engineering Research Center of Infrared Gas Sensing Technique,Changchun 130012,China
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    Xueying WANG, Zhening ZHANG, Mingquan PI, Zihang PENG, Chuantao ZHENG, Fang SONG, Yue YANG, Yiding WANG. On-chip Mid-infrared Indium Gallium Arsenic Suspended Waveguide Gas Sensors[J]. Acta Photonica Sinica, 2023, 52(10): 1052414

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    Paper Information

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    Received: Aug. 14, 2023

    Accepted: Oct. 12, 2023

    Published Online: Dec. 5, 2023

    The Author Email: Yue YANG (yangyue@jlu.edu.cn)

    DOI:10.3788/gzxb20235210.1052414

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