Chinese Journal of Lasers, Volume. 52, Issue 11, 1104002(2025)

Research Progress in Analysis of Inorganic Solid Materials Using Laser Ionization Mass Spectrometry

Yun Cui1,2,3、*, Xiaoyu Yang1, Chunxian Tao1、**, Shijie Liu2,3,4、***, Jianfei Chen1, and Jianda Shao3,4
Author Affiliations
  • 1School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
  • 2Department of High-Power Laser Optics Technology and Engineering, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201815, China
  • 3Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 4China-Russia Belt and Road Joint Lab on Laser Sciences, Shanghai 201800, China
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    Figures & Tables(25)
    Schematic diagram of laser ionization mass spectrometry
    Schematic diagrams of particle distributions after laser-solid interaction[21]. (a) Narrow-angle particle distribution in vacuum condition; (b) wide-angle particle distribution caused by collisions between laser and ambient gases under low-pressure buffer gas condition
    Approximate time scales of ns and fs laser energy absorptions and corresponding physical processes during and after laser pulse is applied[27]. (a) ns laser; (b) fs laser
    Laser-solid interaction. (a) ns laser-solid interaction; (b) fs laser-solid interaction
    Measured laser energy as a function of intensity of generated Al signal using densely sintered AlN and AlN powders at different wavelengths[39]. (a) Densely sintered AlN; (b) AlN powder
    Relationship between yield of Cu ions and laser fluence at infrared/ultraviolet wavelengths[44]
    Determined relative sensitivity coefficients of elements in different substrates using different laser ablations[48]. (a) ns laser with power density of 9×1010 W·cm-2; (b) fs laser with power density of 9×1013 W·cm-2
    Schematic diagrams of several commonly used mass analysis techniques
    Schematic diagram of TOF-MS
    Schematic diagrams of LI-TOF-MS[21]. (a) On-axis reflection LI-TOF-MS with particle ejection direction parallel to extraction direction; (b) orthogonal reflection LI-TOF-MS with particle ejection direction perpendicular to extraction direction
    Stable spiral motion trajectory of ion between central and outer electrodes within Orbitrap mass analyzer[56]
    Diagram of section of C-Trap ion accumulation device and Orbitrap mass analyzer[56]
    Internal diagram of Cassinian ion trap[58]
    Schematic diagram of fourth-order ion trap[59]
    Microscope and laser device layout of LMS-GT[65]
    Schematic of dual-pulse fs-laser system with miniature mass spectrometer[67]
    Schematic of depth profiling and imaging of Cu-Sn-Pb alloy surface using LIMS[68]
    Depth analysis curves of common contaminants in electrochemically deposited Cu samples obtained using SIMS[70]
    Depth analysis curves of common contaminants in electrochemically deposited Cu samples containing multiple contaminated layers obtained using LIMS[70]
    Signal intensity distributions of Sn, Ag and related organic pollutants C, O, and S at Sn-Ag solder joints obtained by two-dimensional layer-based method[73]
    3D element distributions recorded in Nantan meteorite[8]. (a) Photograph of meteorite; (b)‒(s) distributions of specific elements in meteorite
    Ablation craters produced by laser ablation with different wavelengths[75]. (a) Comparison of ablation craters; (b) close-up image of UV-258 nm ablation crater; (c) Gunflint chert sample view
    Elemental imaging of blue and white porcelain pieces of Ming Dynasty[81]. (a) Imaging area of blue and white porcelain pieces of Ming Dynasty; (b)‒(p) images of multiple elements
    • Table 1. Performance comparison of three MS techniques

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      Table 1. Performance comparison of three MS techniques

      Main performanceLA-ICP-MSMALDILIMS
      Mass resolution~0.1 a.u. (typical)~1×104~1×104
      Direct analysisNoNoYes
      Detection objectMost metal elements and some non-metal elementsAll elementsAll elements
      Spatial resolutionμm (lateral)μm (lateral)
      Semi-quantitative capabilityWithWithoutWith
      Fixed-point analysisNoYesYes
    • Table 2. Comparison of commonly used mass analysis techniques[50-51]

      View table

      Table 2. Comparison of commonly used mass analysis techniques[50-51]

      ParameterQ-MSMagnet sectorTOF-MSFTICR-MSIon trap
      Mass range~104~104~106~105~105
      Mass resolution~103~105~104~106~105
      Accuracy/10-6~1001‒55‒501‒51‒10
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    Yun Cui, Xiaoyu Yang, Chunxian Tao, Shijie Liu, Jianfei Chen, Jianda Shao. Research Progress in Analysis of Inorganic Solid Materials Using Laser Ionization Mass Spectrometry[J]. Chinese Journal of Lasers, 2025, 52(11): 1104002

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    Paper Information

    Category: Measurement and metrology

    Received: Nov. 26, 2024

    Accepted: Feb. 24, 2025

    Published Online: Jun. 12, 2025

    The Author Email: Yun Cui (cuiyun@siom.ac.cn), Chunxian Tao (tao@usst.edu.cn), Shijie Liu (shijieliu@siom.ac.an)

    DOI:10.3788/CJL241392

    CSTR:32183.14.CJL241392

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