Acta Optica Sinica, Volume. 41, Issue 16, 1612003(2021)

Co-Phasing Detecting for Segmented Mirror Based on Multiple Wavelength Interferometry

Wen Ji, Qun Yuan*, Zhishan Gao, Koukou Diwu, Weijian Liu, Ruoyan Wang, and zhenyan Guo
Author Affiliations
  • School of Electronic and Optical Engineering, Nanjing University of Science and Technology, Nanjing, Jiangsu 210094, China
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    Figures & Tables(17)
    Whole interference detection process of piston error of segmented mirror
    Optical path of defocus interference detection for two sub-mirrors
    Detection optical path of segmented mirror seam step shape based on white light microscopic interferometry
    Principle of segmented mirror surface shape detection based on dual-wavelength interferometry. (a) Complete surface shape detection of segmented mirror; (b) optical path difference of step
    Process of solving relative piston error between sub-mirrors
    Schematic of solving piston error between sub-mirrors
    Cutting plan of hexagonal spherical sub-mirrors
    Optical path of co-phasing detection of segmented mirror based on Fizeau dual-wavelength interferometer
    Co-phasing installation system of segmented mirror. (a) Three-dimensional assembly; (b) actual view of system
    Adjustment process of near-zero fringe interferogram for segmented mirror
    Calibration process and results of white light microinterferometer. (a) Interferogram before piston error compensation; (b) interferogram after piston error compensation; (c) seam step topography distribution of segmented mirror under VSI detection mode
    Interferogram of segmented mirror in red and green dual wavelengths before and after piston error compensation. (a) Before compensation; (b) after compensation
    Three-dimensional image of segmented mirror initial wavefront surface shape. (a) Before compensation; (b) after compensation
    Three-dimensional image of segmented mirror fitting wavefront surface shape. (a) Before compensation; (b) after compensation
    • Table 1. Comparison of the first four terms of circular and hexagonal Zernike standard polynomials

      View table

      Table 1. Comparison of the first four terms of circular and hexagonal Zernike standard polynomials

      ZjZernike standard polynomial for circular apertureZernike standard polynomial for hexagonal aperture
      Piston term Z111
      X tilt term Z2x2.19089x
      Y tilt term Z3y2.19089y
      Deforcus term Z4-1+2(x2+y2)-1.70499+4.09197(x2+y2)
    • Table 2. Parameters of pherical len

      View table

      Table 2. Parameters of pherical len

      ShapeEffective focal length /mmApertureSurface quality
      Concave spherical surface152.311f/260--40
    • Table 3. Detection data of segmented mirror before and after compensation

      View table

      Table 3. Detection data of segmented mirror before and after compensation

      Detection dateBefore compensationAfter compensation
      Diameter of circumscribed circle of sub-mirrors /mm3434
      Tilt around the X axis of sub mirror A /(″)0.460.65
      Tilt around the Y axis of sub mirror A /(″)-0.44-0.64
      X-axis distance of middle points of sub-mirrors /mm32.332.3
      Piston term of sub mirror A /nm-392.4-398.0
      Piston term sub mirror B /nm281.6-279.5
      Z-axis distance of middle points of the sub-mirror /nm-674.0-118.6
      Piston error /nm601.616.0
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    Wen Ji, Qun Yuan, Zhishan Gao, Koukou Diwu, Weijian Liu, Ruoyan Wang, zhenyan Guo. Co-Phasing Detecting for Segmented Mirror Based on Multiple Wavelength Interferometry[J]. Acta Optica Sinica, 2021, 41(16): 1612003

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Feb. 1, 2021

    Accepted: Mar. 11, 2021

    Published Online: Aug. 12, 2021

    The Author Email: Yuan Qun (yuanqun@njust.edu.cn)

    DOI:10.3788/AOS202141.1612003

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