Laser & Optoelectronics Progress, Volume. 60, Issue 12, 1200001(2023)

Techniques and Applications of Chromatic Confocal Microscopy

Tanbin Shao, Kecheng Yang, Min Xia, and Wenping Guo*
Author Affiliations
  • School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, Hubei, China
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    Figures & Tables(34)
    Schematics of chromatic confocal microscopy. (a) Based on beam splitter; (b) based on fiber coupler
    Schematic diagram of a beam scanning chromatic confocal microscope[7]
    Schematic diagrams of the line-scanning chromatic confocal sensor[20]
    Drawing of a chromatic confocal θ-microscope[24]
    Schematic of the snapshot chromatic confocal matrix sensor[19]
    Experimental setup and scanning pattern for the microLED-based chromatic confocal microscope[37]. (a) Experimental setup; (b) schematic pattern of the scanning microLED array
    Schematic diagrams of dispersion focusing and experimental prototype of CCM[61]. (a) Schematic diagram of the negative dispersion phenomenon of FZP; (b) experimental prototype
    Schematic of a chromatic confocal measurement system[4]
    Prior self-reference strategy by pre-scanning progress[44]
    Measurement flowchart with the prior self-reference strategy[44]
    Fluctuation of peak finding results of different algorithms[40]. (a) Centroid method; (b) modified centroid method by the interpolation density of 5; (c) modified centroid method by the interpolation density of 9
    Flowchart of mean-shift iterative algorithm
    Schematic of physical slit and virtual slit detection[81]. (a) Physical slit; (b) virtual slit
    Cross-sectional surface profile of the 8 μm step sample[37]
    Reconstructed 3D image of an onion epidermis and its volume image[37]. (a) 3D image; (b) volume image
    Schematic diagrams of line-scanned chromatic confocal microscope[84]. (a) Optical configuration; (b) prototype system
    Schematic diagrams of the spatially matching image fiber pairs[84]. (a) Optical configuration of fiber pairs; (b) optimal design of the fiber core diameter and fiber pitch
    Optical system configuration[33]: (a) DMD-based chromatic confocal microscopic system; (b) DMD projection mode; (c) corresponding CCD sensors
    Light intensity distribution obtained using four different projecting spot sizes[33]
    Experimental results[18]. (a) Comparison between the original spectrum signal and the processed signal after one-time deconvolution (the above is the original one while the bottom is the processed one); (b) depth response curves obtained by different number of iterations; (c) relationship between iteration number and FWHM of depth response curve
    Media 1[92]. (a) CCM image of porcine buccal mucosa; (b) an image of the same tissue from the Lucid Vivascope confocal microscope
    Media 2[92]. (a) CCM image of porcine buccal mucosa; (b) an image of the same tissue from the Lucid Vivascope confocal microscope
    Schematic of chromatic confocal endoscope[27]
    Comparison of confocal images in human fingers[27]. (a) Confocal images of human fingers obtained by CCE; (b)(c) cross-sectional and frontal confocal images of human fingers obtained with a portable confocal microscope
    Cross-section confocal images of human lower lip[27]. (a) Confocal image of human lower lip internal section obtained by CCE; (b) Frontal confocal image of human lower lip obtained by portable confocal microscope
    System structure and dispersion probe schematic diagram[94].(a) Schematic of the chromatic confocal system; (b) schematic of the dispersion probe; (c) structure of the annular aperture; (d) the beam of approximately fixed angle of incidence
    Three-dimensional thickness topography of film 3[94]
    Confocal images acquired with the experimental system[99]. (a) Standard resolution target; (b) optical section of a microprocessor chip; (c) optical section of the same chip acquired at a different level; (d)-(f) identical to those directly above, however, the optical sectioning strength of the images has been enhanced
    Structural configuration of the on-machine measurement system[101]
    Schematic presentation of the principle of operation of the optical system[104]
    The spectral data acquired by the detector in two states[104].(a) The offline regime; (b) the online regime
    • Table 1. Performance comparison of different peak extraction algorithms[42]

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      Table 1. Performance comparison of different peak extraction algorithms[42]

      Peak extraction algorithmAccuracy /%Precision /%Elapsed time /ms
      Centroid peak extraction0.42761.39680.0064
      Parabola fitting0.16260.81390.5021
      Gauss fitting0.01130.80016.0817
      MS iteration0.09790.80960.0972
    • Table 2. Thickness measurements of different instruments[94]

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      Table 2. Thickness measurements of different instruments[94]

      Film No.Thickness /nm
      Ellipsometer M-2000Filmetrics F20Self-reference method
      Film 193.5691.8891.92
      Film 2299.34300.10299.99
      Film 3508.25510.23509.82
    • Table 3. Form error parameters of the on-machine and offline measurements101

      View table

      Table 3. Form error parameters of the on-machine and offline measurements101

      SampleParameterOn-machine measurementOffline measurementDeviation
      Spherical surfaceRMS1.49301.3200.1730
      PV5.24804.8860.3620
      Freeform surfaceRMS0.20960.06210.1475
      PV0.88390.53190.3520
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    Tanbin Shao, Kecheng Yang, Min Xia, Wenping Guo. Techniques and Applications of Chromatic Confocal Microscopy[J]. Laser & Optoelectronics Progress, 2023, 60(12): 1200001

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    Paper Information

    Category: Reviews

    Received: Sep. 29, 2022

    Accepted: Jan. 10, 2023

    Published Online: Jun. 5, 2023

    The Author Email: Wenping Guo (wpguo@hust.edu.cn)

    DOI:10.3788/LOP222655

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