Piezoelectrics & Acoustooptics, Volume. 44, Issue 2, 175(2022)

Manufacturing Process of SAW Resonators with Grooved Electrodes for High Temperature Application

ZHANG Qilun1, SHAN Qingchuan1, LI Hualin2, LUO Wei3, SHI Ruchuan1, HAO Wenchang3, YIN Yugang3, and HAN Tao1
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    ZHANG Qilun, SHAN Qingchuan, LI Hualin, LUO Wei, SHI Ruchuan, HAO Wenchang, YIN Yugang, HAN Tao. Manufacturing Process of SAW Resonators with Grooved Electrodes for High Temperature Application[J]. Piezoelectrics & Acoustooptics, 2022, 44(2): 175

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    Paper Information

    Special Issue:

    Received: Jan. 8, 2022

    Accepted: --

    Published Online: Jun. 14, 2022

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2022.02.002

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