Piezoelectrics & Acoustooptics, Volume. 44, Issue 2, 175(2022)

Manufacturing Process of SAW Resonators with Grooved Electrodes for High Temperature Application

ZHANG Qilun1, SHAN Qingchuan1, LI Hualin2, LUO Wei3, SHI Ruchuan1, HAO Wenchang3, YIN Yugang3, and HAN Tao1
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    The demand of surface acoustic wave(SAW) sensors for high temperature is increasing, Langasite provides high-temperature-resistant piezoelectric substrate because of good high-temperature characteristics, however, the electrode will lose its performance due to agglomeration at high temperature, In this paper, a surface acoustic wave resonator with grooved electrodes for high temperature is designed, Pt is used as electrode and langasite is used as piezoelectric substrate, The manufacturing process of the grooved electrodes is proposed and the morphology of the grooved electrode is characterized, The quality of Pt electrodes is improved by increasing the deposition temperature, Finally, a resonator with the wavelength of 8 μm and grooved IDTs of 240 nm in thickness is prepared which can work stably at 1 000 ℃,

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    ZHANG Qilun, SHAN Qingchuan, LI Hualin, LUO Wei, SHI Ruchuan, HAO Wenchang, YIN Yugang, HAN Tao. Manufacturing Process of SAW Resonators with Grooved Electrodes for High Temperature Application[J]. Piezoelectrics & Acoustooptics, 2022, 44(2): 175

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    Paper Information

    Special Issue:

    Received: Jan. 8, 2022

    Accepted: --

    Published Online: Jun. 14, 2022

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2022.02.002

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