[1] Toy M F, Ferhanoglu O, Torun H et al. Uncooled infrared thermo-mechanical detector array: design, fabrication and testing[J]. Sensors and Actuators A: Physical, 156, 88-94(2009).

[2] Shang Y F, Ye X Y, Wang M et al. Design, fabrication, and characterization of a polymer-based MEMS uncooled infrared focal plane array[J]. Journal of Microelectromechanical Systems, 24, 1132-1141(2015).

[3] Zhao Y, Mao M Y, Horowitz R et al. Optomechanical uncooled infrared imaging system: design, microfabrication, and performance[J]. Journal of Microelectromechanical Systems, 11, 136-146(2002).

[4] Datskos P G, Lavrik N V, Hunter S R et al. Infrared imaging using arrays of SiO2 micromechanical detectors[J]. Optics Letters, 37, 3966-3968(2012).

[5] Shang Y F, Ye X Y, Cao L C et al. Coaxial dual-wavelength interferometric method for a thermal infrared focal-plane-array with integrated gratings[J]. Scientific Reports, 6, 25993(2016).

[6] Mueller J P B, Rubin N A, Devlin R C et al. Metasurface polarization optics: independent phase control of arbitrary orthogonal states of polarization[J]. Physical Review Letters, 118, 113901(2017).

[7] Yao Y, Shankar R, Kats M A et al. Electrically tunable metasurface perfect absorbers for ultrathin mid-infrared optical modulators[J]. Nano Letters, 14, 6526-6532(2014).

[8] Wang B X, Duan G Y, Lv W Z et al. Design and experimental realization of triple-band electromagnetically induced transparency terahertz metamaterials employing two big-bright modes for sensing applications[J]. Nanoscale, 15, 18435-18446(2023).

[9] Wang B X, Qin X F, Duan G Y et al. Dielectric-based metamaterials for near-perfect light absorption[J]. Advanced Functional Materials, 34, 2402068(2024).

[10] Meng F L, Chang Y C, Pan C et al. Nanostructured color filters for CMOS image sensors[J]. IEEE Photonics Technology Letters, 35, 641-644(2023).

[11] Zou X J, Zhang Y M, Lin R Y et al. Pixel-level Bayer-type colour router based on metasurfaces[J]. Nature Communications, 13, 3288(2022).

[12] Ou X N, Zeng T B, Zhang Y et al. Tunable polarization-multiplexed achromatic dielectric metalens[J]. Nano Letters, 22, 10049-10056(2022).

[13] Chen W T, Zhu A Y, Sisler J et al. A broadband achromatic polarization-insensitive metalens consisting of anisotropic nanostructures[J]. Nature Communications, 10, 355(2019).

[14] Yu N F, Genevet P, Kats M A et al. Light propagation with phase discontinuities: generalized laws of reflection and refraction[J]. Science, 334, 333-337(2011).

[15] Ning Y, Zhang S, Hu Y et al. Simulation of monolithically integrated meta-lens with colloidal quantum dot infrared detectors for enhanced absorption[J]. Coatings, 10, 1218(2020).

[16] Meng F L, Liu J L, Yue J X et al. Design of a polarization-insensitive broadband achromatic metalens for mid-wave infrared detector[J]. Optics Letters, 49, 5563-5566(2024).

[17] Hou H W, Zhang Y Y, Luo Z D et al. Design and fabrication of monolithically integrated metalens for higher effective fill factor in long-wave infrared detectors[J]. Optics and Lasers in Engineering, 150, 106849(2022).

[18] Yoon G, Kim I, Rho J. Challenges in fabrication towards realization of practical metamaterials[J]. Microelectronic Engineering, 163, 7-20(2016).

[19] Patoux A, Agez G, Girard C et al. Challenges in nanofabrication for efficient optical metasurfaces[J]. Scientific Reports, 11, 5620(2021).

[20] Liu J M, Yang J, Zhao Y W et al. Research progress of GaSb single crystal[J]. Journal of Synthetic Crystals, 53, 1-11(2024).

[21] Zhang S Y, Soibel A, Keo S A et al. Solid-immersion metalenses for infrared focal plane arrays[J]. Applied Physics Letters, 113, 111104(2018).

[22] Li X, Ma X L, Luo X G. Principles and applications of metasurfaces with phase modulation[J]. Opto-Electronic Engineering, 44, 255-275(2017).

[23] Yan C, Hu S Y, Gu B B. Advances in microscopic imaging with metalenses: design, fabrication, and applications (Invited)[J]. Laser & Optoelectronics Progress, 61, 0211028(2024).

[24] Aieta F, Genevet P, Kats M A et al. Aberration-free ultrathin flat lenses and axicons at telecom wavelengths based on plasmonic metasurfaces[J]. Nano Letters, 12, 4932-4936(2012).

[25] Wasiak M, Motyka M, Smołka T et al. Absorption and dispersion in undoped epitaxial GaSb layer[J]. Materials Research Express, 5, 025907(2018).

[26] Khorasaninejad M, Chen W T, Devlin R C et al. Metalenses at visible wavelengths: diffraction-limited focusing and subwavelength resolution imaging[J]. Science, 352, 1190-1194(2016).