The Journal of Light Scattering, Volume. 32, Issue 3, 245(2020)
Research on Surface Defect Detection Methodof Glass Wafer Based on Light Scattering Theory
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Tu Zhengqian, Dong Lichao, Zhao Dongfeng, Feng Di, Wang Shenze. Research on Surface Defect Detection Methodof Glass Wafer Based on Light Scattering Theory[J]. The Journal of Light Scattering, 2020, 32(3): 245
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Received: Sep. 7, 2019
Accepted: --
Published Online: Jan. 28, 2021
The Author Email: Zhengqian Tu (tuzhengqian@buaa.edu.cn)
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