[1] [1] SHI Q, SU Y, QIU A P, et al.. Device level vacuum packaging technologies of MEMS gyroscopes ［J］. Opt. Precision Eng., 2009, 17(8): 1987-1992. (in Chinese)

[2] [2] LI J L, FANG J CH, SHENG W, et al.. Calculation and simulation of silicon MEMS gyroscope with dual-mass resonant output ［J］. Opt. Precision Eng., 2008, 16(3): 484-491. (in Chinese)

[3] [3] WEINBERG M S, KOUREPENIS A. Error sources in in-plane silicon tuning-fork MEMS gyroscopes ［J］. Journal of Microelectromechanical Systems,15(3), 2006:479-491.

[4] [4] YANG B, ZHOU B L. Analysis of quadrature error of silicon micromachined gyroscope ［J］. Chinese Journal of Mechanical Engineering, 2007, 18(10): 1182-1185. (in Chinese)

[5] [5] XU Y SH, WANG SH R, JI X SH, et al.. Analysis on quadrature error of micromachined vibratory gyroscope［J］. Chinese Journal of Scientific Instrument, 2006, 27(6): 105-107. (in Chinese)

[6] [6] PHANI A S, SESHIA A A, PALANIAPAN M, et al.. Modal coupling in micromechanical vibratory rate gyroscopes ［J］. IEEE Sensors Journal, 2006, 6(5): 1144-1152.

[7] [7] SHI Q, QIU A P, SU Y, et al.. Mechanical coupling error of silicon microgyroscope ［J］. Opt. Precision Eng., 2008, 16(5): 893-898. (in Chinese)

[8] [8] QIU A P, SHI Q, SU Y, et al.. Dual-mass vibrating silicon microgyroscope: China, ZL200710133223.5 ［P］. 2008-03-05. (in Chinese)

[9] [9] LIU H W. Mechanics of MaterialsⅡ(Fourth Edition) ［M］. Beijing: Higher Education Press, 2004: 28-59. (in Chinese)

[10] [10] IYER S V. Modeling and simulation of non-idealities in a z-axis CMOS-MEMS gyroscope ［D］. Pittsburgh: Carnegie Mellon University, 2003.

[11] [11] LI J M. Research on High Signal-noise Ratio of Capacitive Micromechanical Gyroscope ［D］. Taiyuan: North University of China, 2005. (in Chinese)