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Acta Optica Sinica, Volume. 31, Issue 3, 322002(2011)

Freeform-Surface Design of Off-Axis Illumination in Projection Lithography

Xing Shasha*, Wu Rengmao, Li Haifeng, Zheng Zhenrong, and Liu Xu
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    Article index updated: Mar. 10, 2025

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    Xing Shasha, Wu Rengmao, Li Haifeng, Zheng Zhenrong, Liu Xu. Freeform-Surface Design of Off-Axis Illumination in Projection Lithography[J]. Acta Optica Sinica, 2011, 31(3): 322002

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Aug. 11, 2010

    Accepted: --

    Published Online: Mar. 1, 2011

    The Author Email: Shasha Xing (xss222@163.com)

    DOI:10.3788/aos201131.0322002

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology