Laser & Optoelectronics Progress, Volume. 54, Issue 8, 82201(2017)
Design and Analysis of Illumination System of Talbot Self-Imaging Lithographic Equipment
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Tong Junmin, Liu Junbo, Hu Song. Design and Analysis of Illumination System of Talbot Self-Imaging Lithographic Equipment[J]. Laser & Optoelectronics Progress, 2017, 54(8): 82201
Paper Information
Category: Optical Design and Fabrication
Received: Mar. 16, 2017
Accepted: --
Published Online: Aug. 2, 2017
The Author Email: Tong Junmin (tjmtx@126.com)
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