Pressure sensor with wide detection range and high sensitivity for wearable human health monitoring

Lingchen Liu; Ying Yuan; Hao Xu; Xiaokun Qin; Xiaofeng Wang; Zheng Lou; Lili Wang

doi:10.1088/1674-4926/24110017

Journal of Semiconductors, Volume. 46, Issue 4, 042401(2025)

Pressure sensor with wide detection range and high sensitivity for wearable human health monitoring

Lingchen Liu^1,2, Ying Yuan^1,3, Hao Xu^1、*, Xiaokun Qin^1,2, Xiaofeng Wang^1,4, Zheng Lou^1,2、**, and Lili Wang^1,2、***

Author Affiliations

¹State Key Laboratory of Semiconductor Physics and Chip Technologies, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China

²Center of Materials Science and Optoelectronic Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

³Key Laboratory of Lignocellulosic Chemistry, College of Material Science and Technology, Beijing Forestry University, Beijing 100083, China

⁴Sino-Russian International Joint Laboratory for Clean Energy and Energy Conversion Technology, College of Physics, Jilin University, Changchun 130012, China

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Lingchen Liu, Ying Yuan, Hao Xu, Xiaokun Qin, Xiaofeng Wang, Zheng Lou, Lili Wang. Pressure sensor with wide detection range and high sensitivity for wearable human health monitoring[J]. Journal of Semiconductors, 2025, 46(4): 042401

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Paper Information

Category: Research Articles

Received: Nov. 17, 2024

Accepted: --

Published Online: May. 21, 2025

The Author Email: Hao Xu (HXu), Zheng Lou (ZLou), Lili Wang (LLWang)

DOI:10.1088/1674-4926/24110017

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laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology