Acta Optica Sinica, Volume. 26, Issue 11, 1605(2006)
Improvement on Measuring Grating Parameters with Diffraction Orders of m=±1 Efficiencies Ratio
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[in Chinese], [in Chinese], [in Chinese]. Improvement on Measuring Grating Parameters with Diffraction Orders of m=±1 Efficiencies Ratio[J]. Acta Optica Sinica, 2006, 26(11): 1605