Fig. 1. Working principle of the scanning mirror

Fig. 2. Lightweight layout of the scanning mirror

Fig. 3. Lightweight model of the scanning mirror

Fig. 4. Schematic diagram of components of the scanning mirror

Fig. 5. Principle of the ball joint flexible support mode

Fig. 6. Model of the ball joint support. (a) Three-dimensional model; (b) section view

Fig. 7. Structure of the ball joint

Fig. 8. Structure of the flexible hinge

Fig. 9. Model of the flexible hinge

Fig. 10. Finite element model of the scanning mirror

Fig. 11. Deformation figure of the ball hinge mode. (a) Y-direction gravity; (b) coupling of Y-direction gravity and uniform temperature rise at 40 ℃

Fig. 12. Dformation figure of the flexible hinge mode. (a) Y-direction gravity; (b) coupling of Y-direction gravity and uniform temperature rise at 40 ℃

Fig. 13. Vibration shape diagram of the ball hinge mode. (a) First mode; (b) second mode; (c) third mode

Fig. 14. Vibration shape diagram of the flexible hinge mode. (a) First mode; (b) second mode; (c) third mode

Fig. 15. Result of the surface inspection