Optics and Precision Engineering, Volume. 17, Issue 6, 1350(2009)
Micro integrated pressure,temperature,and relative humidity sensor using adhesive bonding with SU-8
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ZHANG Jian-gang, PANG Cheng, FANG Zhen, ZHAO Zhan. Micro integrated pressure,temperature,and relative humidity sensor using adhesive bonding with SU-8[J]. Optics and Precision Engineering, 2009, 17(6): 1350
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