Parallel fabrication of silicon concave microlens array by femtosecond laser irradiation and mixed acid etching

An Pan; Tao Chen; Cunxia Li; Xun Hou

doi:10.3788/COL201614.052201

Chinese Optics Letters, Volume. 14, Issue 5, 052201(2016)

Parallel fabrication of silicon concave microlens array by femtosecond laser irradiation and mixed acid etching

An Pan¹, Tao Chen^1、*, Cunxia Li², and Xun Hou¹

¹Key Laboratory for Physical Electronics and Devices of the Ministry of Education, Shaanxi Key Lab of Information Photonic Technique, School of Electronics & Information Engineering, Xi’an Jiaotong University, Xi’an 710049, China

²Xi’an University of Technology, Department of Applied Physics, Xi’an 710049, China

show less

References(32)

[1] K. Bescherer, D. Munzke, O. Reich, H.-P. Loock. Appl. Opt., 52, B40(2013).

[2] J. Lin, L. Xu, S. Wang, H. Han. Chin. Opt. Lett., 12, 101402(2014).

[3] C. Wu, J. Ko, C. C. Davis. J. Opt. Soc. Am. A, 32, 964(2015).

[4] Q. Wang, H. Deng, T. Jiao, D. Li, F. Wang. Chin. Opt. Lett., 8, 1671(2010).

[5] Y. Y. Sun, L. S. Ong, X.-C. Yuan. Appl. Phys. Lett., 89, 141108(2006).

[6] B. Pezeshki, J. Heanue, D. Ton, T. Schrans, S. Rangarajan, S. Zou, G. W. Yoffe, A. Liu, M. Sherback, J. Kubicky, P. Ludwig. J. Lightwave Technol., 32, 2796(2014).

[7] E. Massera, I. Rea, I. Nasti, P. Maddalena, G. D. Francia. Appl. Opt., 45, 6746(2006).

[8] G. Molar-Velázquez, F. J. Renero-Carrillo, W. Calleja-Arriaga. Optik, 121, 843(2010).

[9] J. Albero, C. Gorecki, L. Nieradko, B. Päivänranta, V. Gomez, H. Thienpont, N. Passilly. J. Eur. Opt. Soc.-Rapid, 5, 10001(2010).

[10] T. Wu, K. Hane. Appl. Opt., 50, 5321(2011).

[11] Z. Moktadir, E. Koukharenka, M. Kraft, D. M. Bagnall, H. Powell, M. Jones, E. A. Hinds. J. Micromech. Microeng., 14, S82(2004).

[12] L. Erdmann, D. Efferenn. Opt. Eng., 36, 1094(1997).

[13] K. P. Larsen, J. T. Ravnkilde, O. Hansen. J. Micromech. Microeng., 15, 873(2005).

[14] C. F. Chen, S. D. Tzeng, H. Y. Chen, S. Gwo. Opt. Lett., 30, 652(2005).

[15] S. Ilyas, M. Gal. Appl. Phys. Lett., 89, 211123(2006).

[16] H. Tao, X. Song, Z. Hao, J. Lin. Chin. Opt. Lett., 13, 061402(2015).

[17] Y. Liu, B. Zhu, L. Wang, J. Qiu, Y. Dai, H. Ma. Appl. Phys. Lett., 92, 121113(2008).

[18] T. Q. Jia, H. X. Chen, M. Huang, F. L. Zhao, J. R. Qiu, R. X. Li, Z. Z. Xu, X. K. He, J. Zhang, H. Kuroda. Phys. Rev. B, 72, 125429(2005).

[19] H. Zhang, H. Liu, J. Si, W. Yi, F. Chen, X. Hou. Opt. Express, 19, 12039(2011).

[20] W. Tan, Y. Yang, J. Si, J. Tong, W. Yi, F. Chen, X. Hou. J. Appl. Phys., 107, 043104(2010).

[21] D. Wu, J.-N. Wang, L.-G. Niu, X. L. Zhang, S. Z. Wu, Q.-D. Chen, L. P. Lee, H. B. Sun. Adv. Opt. Mater., 2, 751(2014).

[22] L.-G. Niu, D. Wang, T. Jiang, S.-Z. Wu, A.-W. Li, J.-F. Song. Opt. Commun., 284, 777(2011).

[23] J. Qiu, K. Miura, K. Hirao. J. Non-Cryst. Solids, 354, 1100(2008).

[24] Z. Yong, C. Zhan, J. Lee, S. Yin, P. Ruffin. Opt. Lett., 31, 1794(2006).

[25] D. Wu, S.-Z. Wu, L.-G. Niu, Q.-D. Chen, R. Wang, J.-F. Song, H.-H. Fang, H.-B. Sun. Appl. Phys. Lett., 97, 031109(2010).

[26] C. H. Lin, L. Jiang, Y. H. Chai, H. Xiao, S. J. Chen, H. L. Tsai. Appl. Phys. A Mater. Sci. Process., 97, 751(2009).

[27] A. Pan, B. Gao, T. Chen, J. Si, C. Li, F. Chen, X. Hou. Opt. Express, 22, 15245(2014).

[28] J. J. J. Kaakkunen, M. Silvennoinen, K. Paivasaari, P. Vahimaa. Phys. Proc., 12, 89(2011).

[29] J. Bekesi, J. J. J. Kaakkunen, W. Michaeli, F. Klaiber, M. Schoengart, J. Ihlemann, P. Simon. Appl. Phys. A Mater. Sci. Process., 99, 691(2010).

[30] M. Lippold, F. Buchholz, C. Gondek, F. Honeit, E. Wefringhaus, E. Kroke. Sol. Energy Mater. Sol. Cells, 127, 104(2014).

[31] H. Robbins, B. Schwartz. J. Electrochem. Soc., 107, 108(1960).

[32] M. S. Kulkarni, H. F. Erk. J. Electrochem. Soc., 147, 176(2000).

CLP Journals

[1] Haiying Song, Shengwang Tan, Elshaimaa M. Emara, Yanjie Zhang, Shibing Liu, Yao Li, Haiyun Liu, "Effect of metal surface morphology on nano-structured patterns induced by a femtosecond laser pulse and its experimental verification," Chin. Opt. Lett. 16, 073202 (2018)

[2] Changcheng Xiang, Changhe Zhou, Wei Jia, Jun Wu, "Five-port beam splitter of a single-groove grating," Chin. Opt. Lett. 16, 070501 (2018)

[3] Bo Dai, Huansi Wang, Qiao Xu, Zhenqing Li, Chunxian Tao, Dawei Zhang, "Rapid fabrication of mini droplet lens array with tunable focal length," Chin. Opt. Lett. 16, 122201 (2018)

Cited By

[1] Chensheng Wu, Daniel A. Paulson, John R. Rzasa, Christopher C. Davis. Comparison between the plenoptic sensor and the light field camera in restoring images through turbulence. OSA Continuum, 2, 2511(2019).

Tools

Get Citation

Copy Citation Text

An Pan, Tao Chen, Cunxia Li, Xun Hou, "Parallel fabrication of silicon concave microlens array by femtosecond laser irradiation and mixed acid etching," Chin. Opt. Lett. 14, 052201 (2016)

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites

Paper Information

Category: Optical Design and Fabrication

Received: Jan. 4, 2016

Accepted: Mar. 4, 2016

Published Online: Aug. 6, 2018

The Author Email: Tao Chen (tchen@mail.xjtu.edu.cn)

DOI:10.3788/COL201614.052201

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology