Algorithm for Suppressing Optical Spot Crosstalk in Angular Position Detection of Micromirror Array

Ting Wang; Jingpei Hu; Lihua Huang; Aijun Zeng; Huijie Huang; Sergey Avakaw

doi:10.3788/CJL230482

Chinese Journal of Lasers, Volume. 50, Issue 23, 2304003(2023)

Algorithm for Suppressing Optical Spot Crosstalk in Angular Position Detection of Micromirror Array

Ting Wang^1,2, Jingpei Hu^1,2、*, Lihua Huang^1,2, Aijun Zeng^1,2, Huijie Huang^1,2, and Sergey Avakaw³

¹Laboratory of Information Optics and Optoelectronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

²Centerof Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

³Company of KBTEM-OMO Republication Unitary Scientific and Production Enterprise, Minsk 220033, Belarus

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Figures & Tables(6)

Fig. 1. Schematics of MMA

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Fig. 2. Schematic of angle position detection module

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Fig. 3. Schematic of light intensity distribution of large size Gaussian spot on MMA

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Table 1. Ratio of Gaussian spot size on MMA to MMA mirror size under different Gaussian divergence angles

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Table 1. Ratio of Gaussian spot size on MMA to MMA mirror size under different Gaussian divergence angles

Gaussian beam divergence angle /（°）	Size of spot along long axis /mm	Size of spot along short axis /mm	Size ratio	Extra-spot ratio
0.024	0.470614	0.392755	0.28880	0
0.050	0.943926	0.777051	1.14606	0.14606
0.070	1.316465	1.079978	2.22149	1.22149

Table 2. Errors of mirror angular positions without crosstalk suppression algorithm

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Table 2. Errors of mirror angular positions without crosstalk suppression algorithm

Mirror No.	Extra-spot ratio is 0		Extra-spot ratio is 14.6%		Extra-spot ratio is 122.1%
Mirror No.	$α$	$β$	$α$	$β$	$α$	$β$
1	1.78	1.20×10^-2	411.78	1.96	980.72	19.01
2	1.75	1.97×10^-2	295.45	171.78	340.69	930.71
3	1.78	8.59×10^-3	411.42	1.26	981.29	10.91
4	1.56	1.35×10^-2	413.54	27.60	828.47	292.78
5	4.59	4.35	1630.42	1587.64	5181.64	5387.48
6	1.57	3.39×10^-2	412.34	28.13	826.03	285.32
7	1.56	2.16×10^-2	396.32	2.73	947.39	16.84
8	1.56	5.72×10^-2	278.23	173.74	300.24	933.25
9	1.58	6.56×10^-2	395.90	2.02	945.72	9.52

Table 3. Errors of mirror angular positions with crosstalk suppression algorithm

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Table 3. Errors of mirror angular positions with crosstalk suppression algorithm

Mirror No.	Extra-spot ratio is 0		Extra-spot ratio is 14.6%		Extra-spot ratio is 122.1%
Mirror No.	$α$	$β$	$α$	$β$	$α$	$β$
1	2.27×10^-2	5.60×10^-3	2.41×10^-1	5.11×10^-1	7.29	4.45
2	2.09×10^-2	5.37×10^-3	2.11×10^-1	6.61×10^-2	7.02	2.47×10^-1
3	2.09×10^-2	3.77×10^-3	2.37×10^-1	4.55×10^-1	7.29	4.42
4	3.49×10^-3	3.70×10^-3	2.44×10^-2	4.91×10^-1	1.26×10^-1	4.27
5	0	0	1.75×10^-2	1.75×10^-2	1.75×10^-2	1.75×10^-2
6	1.75×10^-3	1.66×10^-3	2.27×10^-2	4.37×10^-1	8.73×10^-2	4.26
7	1.92×10^-2	3.14×10^-4	2.95×10^-1	4.58×10^-1	7.27	4.33
8	1.92×10^-2	4.97×10^-5	1.85×10^-1	1.77×10^-2	6.90	2.69×10^-1
9	1.92×10^-2	1.15×10^-3	2.91×10^-1	4.13×10^-1	7.24	4.29

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Ting Wang, Jingpei Hu, Lihua Huang, Aijun Zeng, Huijie Huang, Sergey Avakaw. Algorithm for Suppressing Optical Spot Crosstalk in Angular Position Detection of Micromirror Array[J]. Chinese Journal of Lasers, 2023, 50(23): 2304003

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Paper Information

Category: Measurement and metrology

Received: Feb. 2, 2023

Accepted: Apr. 28, 2023

Published Online: Dec. 7, 2023

The Author Email: Jingpei Hu (hujingpei@siom.ac.cn)

DOI:10.3788/CJL230482

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology